NPL Poster: Performance verification of a dual sensor stage

Abstract: The current trend for nanopositioning with increased speed has led to the development by Queensgate of a dual sensor system for servo control of single axis displacement stages. The stage and control system is currently being evaluated using optical interferometry developed at the National Physical Laboratory. Preliminary results show the performance of the optical interferometer and the stage.

Authors: A.Yacoot, J. Mountford, M. Tedaldi, B. Reid, S. Levy

The poster can also be viewed on the NPL website