Drawings and Documents
Millisecond response times and high bandwidth make the WP-Z-120A wafer positioning system ideal for applications where high throughput is essential. The stage is designed to hold 300 mm (12″) wafers and delivers exceptional performance with loads of up to 8 kg suitable for heavy wafer chucks.
The stage uses capacitive positioning sensors to provide nanometer displacement measurement and closed-loop feedback. Flexure guidance offers friction-free, reliable motion over 120 μm closed loop range and achieves fast response and settle times with Queensgate’s digital closed-loop controllers.