The H116 stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.
|um||um||mm/s||mm||kg||mm||SPR **||um res|
|H116ARNN||+/- 0.7||0.04||40||255 X 215||7.7||2||200||No|
|H116ARN1||+/- 0.7||0.1||40||255 X 215||7.7||2||200||0.1|
|H116BRNN||+/- 0.7||0.1||40||255 X 215||7.7||5||200||No|
|H116BRN2||+/- 0.7||0.5||40||255 X 215||7.7||5||200||0.1|
Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanT controllers with backlash correction enabled, all repeatability is Uni-directiona
**S.P.R: Full steps per revolution of motor.