The H112 stage is ideal for scanning a wide range of semiconductor wafers, photo masks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12 inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with 250 mm x 250 mm transmitted light area.
|um||um||mm/s||mm||kg||mm||SPR **||um res|
|H112ARNN||+/- 0.7||0.04||40||302 X 302||14.5||2mm||200||No|
|H112ARN1||+/- 0.7||0.01||40||302 X 302||14.5||2mm||200||0.1|
|H112BRNN||+/- 0.7||0.1||40||302 X 302||14.5||5mm||200||No|
|H112BRN2||+/- 0.7||0.5||40||302 X 302||14.5||5mm||200||0.5|
Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.