302 x 302 mm travel stepper motor XY stage

The H112 stage is ideal for scanning a wide range of semiconductor wafers, photo masks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12 inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with 250 mm x 250 mm transmitted light area.

um um mm/s mm kg mm SPR ** um res
Uni-Directional
Repeatability *
Min Step
Size
Recomended
speed
Max Travel
Range
Weight Ball Screw
Pitch
Motor
Type
Encoders
H112ARNN +/- 0.7 0.04 40 302 X 302 14.5 2mm 200 No
H112ARN1 +/- 0.7 0.01 40 302 X 302 14.5 2mm 200 0.1
H112BRNN +/- 0.7 0.1 40 302 X 302 14.5 5mm 200 No
H112BRN2 +/- 0.7 0.5 40 302 X 302 14.5 5mm 200 0.5

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.

  • Suitable for most major brand microscopes.
  • 1µm or better repeatability
  • Optional 100nm linear scales provide the highest resolution available.
  • Wide range of wafer holders
  • 302 mm x 302 mm (12″x12″) travel

Documents:

H112 Stage Datasheet

Drawings:

H112/2ST SLDASM Model
H112/2ST IGES Model
HE12/2ST SLDASM Model
HE12/2ST IGES Model