Drawings and Documents
The H105 is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 can easily accommodate 6″ wafers. H105 stage are fully mapped for improved metric accuracy.
|um||um||mm/s||mm||kg||mm||SPR **||um res|
|H105/2 ##||+/- 0.7||0.04||24||154 x 154||5||2||200||No|
|HE05/2 ##||+/- 0.7||0.04||24||154 x 154||5||2||200||0.1|
Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.