MX61L
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Aluminium plate (H112 stages)
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Aluminium plate (H116 stages)
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Autofocusing System
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ES10ZE Focus Controller
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Glass plate (H112 stages)
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LumaSpec 800 Optical Power Meter
View product$ 1699 -
PS3J100
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Rotatable wafer chuck (H112 stages)
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Rotatable wafer chuck (H116 stages)
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Spring loaded wafer chuck (200 mm notched wafers)
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Spring loaded wafer chuck (H116 stages)
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Wafer chuck (H116 stages)
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