H116 stages
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Aluminum plate – H232 (H116 stages)
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Glass plate – H225 (H116 stages)
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Rotatable wafer chuck – HWC20S (H116 stages)
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Rotatable wafer chuck – HWC20V (H116 stages)
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Spring loaded wafer chuck – H149N (200 mm notched wafers)
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Spring loaded wafer chuck – H149N (H116 stages)
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Wafer chuck – HWC116 (H116 stages)
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