H1052U 6-inch XY motorized stage for semiconductor scanning, compatible with upright industrial microscopes.

ProScan H105/2OL Motorized XY Stage

Name: ProScan H105/2OL Motorized XY Stage
Brand: Prior Scientific

6-inch Semiconductor Scanning For Evident/Olympus MX Industrial Microscopes (154 mm x 154 mm)

The ProScan H105/2OL motorized XY stage is designed for Evident/Olympus industrial microscopes. See the product compatibility tab for details.

With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.

The H105/2OL features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently.

It is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).

Several dedicated industrial sample holders are available: see the accessories tab for the full list.

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Data sheet

Directly compatible with Evident/Olympus industrial microscopes and software
Excellent combination of speed and accuracy
Travel range supports 6-inch wafers
Intelligent Scanning Technology™ (US Patent 7,330,307)
Linear encoders for closed loop positional control

Travel range	154 mm x 154 mm
Unidirectional repeatability	<1.0 µm
Bidirectional repeatability	<3.3 µm
Metric accuracy	0.13 µm/mm
Full travel metric accuracy	<19.3 µm
Resolution	0.04 µm
Squareness	<50 arcsec
Maximum velocity	60 mm/s
Maximum load	10 kg
Encoders	No
Motor type	200 step
Screw pitch	2 mm
Weight	5 kg