ProScan H105/2OL Motorized XY Stage
6-inch Semiconductor Scanning For Evident/Olympus MX Industrial Microscopes (154 mm x 154 mm)
The ProScan H105/2OL motorized XY stage is designed for Evident/Olympus industrial microscopes. See the product compatibility tab for details.
With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.
The H105/2OL features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently.
It is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).
Several dedicated industrial sample holders are available: see the accessories tab for the full list.
- Directly compatible with Evident/Olympus industrial microscopes and software
- Excellent combination of speed and accuracy
- Travel range supports 6-inch wafers
- Intelligent Scanning Technology™ (US Patent 7,330,307)
- Linear encoders for closed loop positional control
- H227 Glass plate (not suitable for transmitted light microscopy)
- H231 Aluminium plate (H105)
- H231B Aluminium plate (H105) with M4 and M6 tapped holes
- HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers
- HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers
H105-EN-Datasheet.pdf
Evident-Olympus-EN-US-Sales-Guide.pdf
H105_2-REFERENCE-IGES.zip
H105_2-REFERENCE-PART-NONAMES.zip
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| H105/2OL | Evident/Olympus | MX50, MX51, MX61, MX61L, MX63, MX63L |
