WP120A 12-inch Single Axis Wafer Piezo Stage
Wafer Positioner With High Load Capacity for Heavy Wafer Chucks
The WP120A wafer piezo stage holds 12-inch wafers and supports loads up to 8 kg. It is compatible with Prior’s OpenStand-L and is designed to operate in vacuum environments, such as in scanning electron microscopy.
In combination with Prior’s ProScan® H112 stage or PureFocus™850 it can be used with techniques for wafer inspection. The stage can further be adapted for more demanding applications and environments.
It features Queensgate’s control technology and friction-free flexure guidance to provide millisecond response times, high bandwidth, and nanometer repeatability, ensuring samples are scanned rapidly and with high precision.
Capacitive sensors provide direct measurement of the moving platform at the nanometer level. Queensgate’s advanced closed-loop control algorithms ensure optimal positioning performance for your application.
- Compatible with high vacuum (HV) environments
- Option with low outgassing Kapton cabling for ultra-high vacuum (UHV) and UHV-RAD environments
- Exceptional combination of nanometer repeatability, large surface area and high load capacity
- 12-inch diameter for semiconductor inspection
- Compatible with other Prior semiconductor inspection hardware
| Range | 120 µm |
|---|---|
| Position Noise | 1.2 nm |
| Repeatability | 5.5 nm |
| Linearity | 0.1% |
| Step Settle | 9 ms |
| Material | Aluminium |
| Stage mass (excluding cables) | 5.8 kg |
| Size (L x W x H) | 375 x 375 x 30 mm |
| Axis | Z |
Contact us for accessories information.
WP120A_Wafer_Stage_EN_Datasheet.pdf
WP120Ainstallationdrawing.pdf
Contact us for compatibility information.
