H116 heavy load 8-inch travel motorized XY stage for upright industrial microscopes.

ProScan HE16/2 Large Format Encoded Motorized XY Stage

Name: ProScan HE16/2 Large Format Encoded Motorized XY Stage
Brand: Prior Scientific

Heavy Load 8-inch Travel Range for Upright Industrial Microscopes (255 mm x 215 mm)

The ProScan HE16/2 encoded motorized XY stage for upright industrial microscopy is compatible with Prior’s OpenStand-L platform and is fully customizable.

It has a long travel range and 25 kg load capacity for scanning large, heavy samples such as 8-inch semiconductor wafers, flat panel displays and printed circuit boards up to 200 mm diameter.

The HE16/2 has linear encoders for exceptional long-range repeatability and a 2 mm ballscrew for a balance of speed and resolution. Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity. It scans large industrial samples reliably and efficiently.

Other drive configurations for increased speed may be available depending on your region.

It is compatible with transmitted light applications and provides easy access for loading samples.

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Data sheet

Easy to integrate into customized imaging solutions
Supports 8-inch wafers, with extra X-axis travel range for easy sample loading
Slim design with 25 kg load capacity
Shielded linear encoders for closed loop control
Intelligent Scanning Technology™ (US Patent 7,330,307)

Travel range	255 mm x 215 mm
Unidirectional repeatability	< 0.6 µm
Bidirectional repeatability	< 0.9 µm
Metric accuracy	0.10 µm/mm
Full travel metric accuracy	< 21.3 µm
Resolution	0.1 µm
Squareness	< 45 arcsec
Maximum velocity	60 mm/s
Maximum load	25 kg
Encoders	0.1 µm linear encoders
Motor type	200 step
Screw pitch	2 mm
Weight	8 kg