ProScan HE05/2ZL Encoded Motorized XY Stage With 6-Inch Travel
Industrial Inspection And Metrology With The Zeiss Axiotron 2 Microscope (154 mm x 154 mm)
The ProScan HE05/2ZL encoded motorized XY stage is designed for the Zeiss Axiotron 2 upright industrial microscope.
With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.
The HE05/2ZL features linear encoders and Prior’s patented Intelligent Scanning Technology (IST) to enhance repeatability, accuracy, and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently with several dedicated sample holders available.
- Directly compatible with Zeiss Axiotron 2
- Excellent combination of speed and accuracy
- Travel range supports 6-inch wafers
- Intelligent Scanning Technology™ (US Patent 7,330,307)
- Linear encoders for closed loop positional control
| Travel range | 154 mm x 154 mm |
|---|---|
| Unidirectional repeatability | <0.9 µm |
| Bidirectional repeatability | <1.1 µm |
| Metric accuracy | 0.09 µm/mm |
| Full travel metric accuracy | <16.8 µm |
| Resolution | 0.1 µm |
| Squareness | <40 arcsec |
| Maximum velocity | 60 mm/s |
| Maximum load | 10 kg |
| Encoders | 0.1 µm linear encoder |
| Motor type | 200 step |
| Screw pitch | 2 mm |
| Weight | 5 kg |
- H227 Glass plate (not suitable for transmitted light microscopy)
- H231 Aluminium plate (H105)
- H231B Aluminium plate (H105) with M4 and M6 tapped holes
- HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers
- HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers
H105_2-REFERENCE-IGES.zip
H105_2-REFERENCE-PART-NONAMES.zip
H105-EN-Datasheet.pdf
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| HE05/2ZL | Zeiss | Axiotron 2 |
