H1052U 6-inch XY motorized stage for semiconductor scanning, compatible with upright industrial microscopes.

ProScan HE05/2OL Encoded Motorized XY Stage With 6-Inch Travel

Name: ProScan HE05/2OL Encoded Motorized XY Stage With 6-Inch Travel
Brand: Prior Scientific

Industrial Inspection With Olympus/Evident MX Industrial Microscopes (154 mm x 154 mm)

The ProScan HE05/2OL encoded motorized XY stage is designed for Evident/Olympus industrial microscopes. See the product compatibility tab for details.

With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.

The HE05/2OL features linear encoders and Prior’s patented Intelligent Scanning Technology (IST) to enhance repeatability, accuracy, and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently, with several dedicated sample holders available.

The HE05/2OL is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).

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Data sheet

Directly compatible with Evident/Olympus industrial microscopes and software
Excellent combination of speed and accuracy
Travel range supports 6-inch wafers
Intelligent Scanning Technology™ (US Patent 7,330,307)
Linear encoders for closed loop positional control

Travel range	154 mm x 154 mm
Unidirectional repeatability	<0.9 µm
Bidirectional repeatability	<1.1 µm
Metric accuracy	0.09 µm/mm
Full travel metric accuracy	<16.8 µm
Resolution	0.1 µm
Squareness	<40 arcsec
Maximum velocity	60 mm/s
Maximum load	10 kg
Encoders	0.1 µm linear encoder
Motor type	200 step
Screw pitch	2 mm
Weight	5 kg