ProScan H105N2F Motorized XY Stage
Flat Top 6-inch Semiconductor Scanning For Upright Microscopes (154 mm x 154 mm travel)
Flat Top 6-inch Semiconductor Scanning For Upright Microscopes (154 mm x 154 mm travel)
The ProScan H105N2F is a motorized XY flat-top stage designed for upright industrial microscopes.
It is fully customizable for integration into OEM devices but also mounts directly onto Nikon industrial microscopes and the Prior OpenStand-L platform. See the product compatibility tab for details.
With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers and other industrial samples.
The H105N2F scans industrial samples reliably and efficiently. It features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity, together with a 2 mm ballscrew for speed.
The H105E2F encoded version is also available with 0.1 μm linear encoders to enhance long-range repeatability, accuracy, and linearity and reliably locates specific regions.
The flat top plate allows easy access to the sample for loading and ensures compatibility with a wide range of optics.
It is compatible with Nikon NIS Elements software (appropriate package required).
This is an ‘OEM & Batch Order’ product. For more information visit our FAQs section.
- Easy to integrate into customized imaging solutions
- Directly compatible with Nikon industrial microscopes and software
- Aesthetic and user friendly flat top design
- Travel range supports 6-inch wafers
- Intelligent Scanning Technology™ (US Patent 7,330,307)
| Specification | H105N2F | H105E2F |
|---|---|---|
| Travel range | 154 mm x 154 mm | 154 mm x 154 mm |
| Uni-directional repeatability | < 0.9 µm | < 0.6 µm |
| Bidirectional repeatability | < 3.6 µm | < 0.9 µm |
| Metric accuracy | < 0.21 µm/mm | <0.12 µm/mm |
| Full travel metric accuracy | < 21.8 µm | < 12.8 µm |
| Resolution | 0.04 µm | 0.1 µm |
| Squareness | 40 arcsec | 25 arcsec |
| Maximum velocity | 40 mm/s | 40 mm/s |
| Maximum load | 10 kg | 10 kg |
| Encoders | No | 0.1 µm linear encoders |
| Motor type | 200 step | 200 step |
| Screw pitch | 2 mm | 2 mm |
| Weight | 4.8 kg | 4.8 kg |
- H227 Glass plate (not suitable for transmitted light microscopy)
- H231 Aluminium plate (H105)
- H231B Aluminium plate (H105) with M4 and M6 tapped holes
- HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers
- HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers
H105N2F-EN-Datasheet.pdf
Nikon-EN-US-Sales-Guide.pdf
H105F-REFERENCE-PART-NONAMES.zip
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| H105N2F | Prior | OpenStand-L | |
| H105E2F | Prior | OpenStand-L | |
| H105N2F | Nikon | L200N, L200ND, L300N, L300ND | |
| H105E2F | Nikon | L200N, L200ND, L300N, L300ND |
