ProScan H105/2U Motorized XY Stage
6-inch Semiconductor Scanning For Upright Industrial Microscopes (154 mm x 154 mm)
The ProScan H105/2U motorized XY stage is designed for upright industrial microscopy and is compatible with Nikon microscopes and the Prior OpenStand platform. See the product compatibility tab for details.
With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.
The H105/2U features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently.
- Easy to integrate into customized imaging solutions
- Excellent combination of speed and accuracy
- Travel range supports 6-inch wafers
- Intelligent Scanning Technology™ (US Patent 7,330,307)
- H227 Glass plate (not suitable for transmitted light microscopy)
- H231 Aluminium plate (H105)
- H231B Aluminium plate (H105) with M4 and M6 tapped holes
- HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers
- HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers
H105-EN-Datasheet.pdf
Nikon-EN-US-Sales-Guide.pdf
H105_2-REFERENCE-IGES.zip
H105_2-REFERENCE-PART-NONAMES.zip
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| H105/2U | Nikon | L200N, L200ND, L300N, L300ND | L200ND and L300ND require H2100 adapter from Prior. |
| H105/2U | Prior | OpenStand-L, OpenStand-U, OpenStand-M |
