ProScan HE16/2 (Nikon) Large Format Encoded Motorized XY Stage
Heavy Load 8-inch Travel Stage for Nikon Industrial Microscopes (255 mm x 215 mm)
The ProScan HE16/2 encoded motorized XY stage is adapted for Nikon L200 and L300 industrial microscopes.
It has a long travel range and 25 kg load capacity for scanning large, heavy samples such as 8-inch semiconductor wafers, flat panel displays and printed circuit boards up to 200 mm diameter.
The HE16/2 (Nikon) has linear encoders for exceptional long-range repeatability and a 2 mm ballscrew for a balance of speed and resolution. Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity. It scans large industrial samples reliably and efficiently.
Other drive configurations for increased speed may be available depending on your region.
It is compatible with transmitted light applications and provides easy access for loading samples.
This stage is compatible with Nikon NIS Elements software (appropriate package required).
- Directly compatible with Nikon industrial microscopes and software
- Supports 8-inch wafers, with extra X-axis travel range for easy sample loading
- Slim design maximizes clearance for wafer chucks and thick samples
- Shielded linear encoders for closed loop control
- Intelligent Scanning Technology™ (US Patent 7,330,307)
| Travel range | 255 mm x 215 mm |
|---|---|
| Unidirectional repeatability | < 0.6 µm |
| Bidirectional repeatability | < 0.9 µm |
| Metric accuracy | 0.10 µm/mm |
| Full travel metric accuracy | < 21.3 µm |
| Resolution | 0.1 µm |
| Squareness | < 45 arcsec |
| Maximum velocity | 60 mm/s |
| Maximum load | 25 kg |
| Encoders | 0.1 µm linear encoders |
| Motor type | 200 step |
| Screw pitch | 2 mm |
| Weight | 8 kg |
- H225 Glass plate (not suitable for transmitted light microscopy)
- H232 Aluminum plate (H116)
- H232B Aluminum plate (H116) with M4 and M6 tapped holes
- HWC20S Wafer chuck, rotatable with steps for 150 mm & 200 mm wafers
- HWC20V Wafer chuck, rotatable for vacuum for 200 mm wafers
H116_2_H116_STAGE-REF-IGES.zip
H116_2_H116_STAGE-REF-PART-NONAMES.zip
H116_2S-REFERENCE-IGES.zip
H116_2S-REFERENCE-PART-NONAMES.zip
H116-Stage-EN-UK-Datasheet.pdf
Nikon-EN-US-Sales-Guide.pdf
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| HE16/2 | Nikon | L300N, L300ND | Requires H2100 adapter from Prior |
| HE16/2-8 | Nikon | L200N, L200ND | Requires H2100 adapter from Prior. Long working distance objectives are required. Y-axis travel reduced by 22.7mm. Rear edge of 8-inch wafer may not be observable. |
