Fast, Accurate Wafer Positionining For High-Throughput Applications
The WP120B is Queensgate’s most accurate wafer positioning stage.
It uses a parallel-kinematic tripod design to achieve sample leveling of ±50 µrad, while achieving milisecond step-and-settle times over the 120 µm closed-loop Z range.
Sub-nanometer-resolution capacitive displacement sensors directly measuring the moving platform, flexure guidance, and high-bandwidth closed-loop control provide exceptional flatness whilst scanning, with pitch and roll errors of less than 2 µrads.
The stage is designed to hold 300 mm wafers, with load capacity up to 8 kg, through-holes allow access for wafer lift-pin systems.
It is compatible with Prior’s ProScan H112 Large Format XY Stage, which offers a full 300 x 300 mm travel range for wafer inspection and defect detection.
