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ProScan HE16/2OL


Encoded Motorized 8-inch Travel Stage For Evident/Olympus MX Industrial Microscopes

The ProScan HE16/2OL encoded motorized XY stage is adapted for Evident/Olympus MX industrial microscopes

It has a long travel range and 25 kg load capacity for scanning large, heavy samples such as 8-inch semiconductor wafers, flat panel displays and printed circuit boards up to 200 mm diameter

The HE16/2OL has linear encoders for exceptional long-range repeatability and a 2 mm ballscrew for a balance of speed and resolution. Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity. It scans large industrial samples reliably and efficiently.

Other drive configurations for increased speed may be available depending on your region. 

It is compatible with transmitted light applications and provides easy access for loading samples. 

This stage is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).


    • Directly compatible with Evident/Olympus industrial microscopes and software
    • Supports 8-inch wafers, with extra X-axis travel range for easy sample loading
    • Slim design maximizes clearance for wafer chucks and thick samples
    • Shielded linear encoders for closed loop control
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
Maximum Travel Range 256 mm x 215 mm
Minimum Step Size (Resolution) 0.04 µm
XY Repeatability ±2.0 µm
Load Capacity 25 kg

Specifications as per datasheet. Please see datasheet for details.

  • H225 Glass plate (not suitable for transmitted light microscopy)

  • H232 Aluminum plate (H116)

  • H232B Aluminum plate (H116) with M4 and M6 tapped holes

  • HWC20S Wafer chuck, rotatable with steps for 150 mm & 200 mm wafers

  • HWC20V Wafer chuck, rotatable for vacuum for 200 mm wafers

Option Manufacturer Compatibility Notes
HE16/2OL Evident/Olympus MX61, MX61L, MX63, MX63L

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