Encoded Motorized 6-inch Travel Stage For Upright Microscopy
The ProScan HE05/2U encoded motorized XY stage is designed for upright industrial microscopy and is compatible with Nikon microscopes and the Prior OpenStand platform. See the product compatibility tab for details.
With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.
The HE05/2U features linear encoders and Prior's patented Intelligent Scanning Technology (IST) to enhance repeatability, accuracy, and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently, with several dedicated sample holders available.
The HE05/2U is compatible with Nikon NIS elements software (appropriate package required).