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ProScan HE05/2NI


Encoded Motorized 6-inch Travel Stage For Nikon Upright Industrial Microscopes

Designed for Nikon industrial microscopes, the H105/2NI stage has 154x154 mm travel specifically to enable complete imaging of 6-inch semiconductor wafers. The stage includes an adapter plate for Nikon microscopes with transmitted light capability. Numerous sample holders dedicated to industrial applications are available for the H105/2NI. Featuring Prior's patented Intelligent Scanning Technology (IST) to optimize stage accuracy, linearity and other performance characteristics in combination with a 2 mm ballscrew for speed, and linear encoders for enhanced long range repeatability, the H105/2NI is optimized for scanning industrial samples reliably and efficiently. Compatible with Nikon NIS Elements Software (requires appropriate software package).


    • Directly compatible with Nikon industrial microscopes and software
    • Excellent combination of speed and accuracy
    • Travel range supports 6-inch wafers
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
    • Linear encoders for closed loop positional control
Maximum Travel Range 154 mm x 154 mm
Minimum Step Size 0.04 µm
XY Repeatability ±0.7 µm, open loop
Load Capacity 20 kg
Stepper Motor 4 phase, 1 A per phase micro stepping
Linear Slides 3 mm precision bearings
Drive Screws Zero backlash, recirculating ball screws; 2 mm or 5 mm pitch

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes
HE05/2NI Nikon L200N, L200ND, L300N, L300ND

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