Main Image

ProScan HE05/2ZL


Encoded Motorized 6-inch Travel Stage For Zeiss Axiotron 2 Microscope

The ProScan HE05/2ZL encoded motorized XY stage is designed for the Zeiss Axiotron 2 upright industrial microscope.

With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.  

The HE05/2ZL features linear encoders and Prior's patented Intelligent Scanning Technology (IST) to enhance repeatability, accuracy, and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently with several dedicated sample holders available.


    • Directly compatible with Zeiss Axiotron 2
    • Excellent combination of speed and accuracy
    • Travel range supports 6-inch wafers
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
    • Linear encoders for closed loop positional control
Travel range 154 mm x 154 mm
Unidirectional repeatability <0.9 μm
Bidirectional repeatability <1.1 μm
Metric accuracy 0.09 μm/mm
Full travel metric accuracy <16.8 μm
Resolution 0.1 µm
Squareness <40 arcsec
Maximum velocity 60 mm/s
Maximum load 10 kg
Encoders 0.1 μm linear encoder
Motor type 200 step
Screw pitch 2 mm
Weight 5 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes

HE05/2ZL

Zeiss Axiotron 2

Would you like to know more about our systems and components?

I have read the privacy policy and am happy to be contacted.

Applications