ProScan H105NL/2

Motorized 6-inch Travel Stage for Nikon LV100 and LV150 Microscopes

The ProScan H105NL/2 motorized XY stage provides 154 x 154 mm XY travel for Nikon LV100 and LV150 upright microscopes.

It is optimized for scanning 6-inch semiconductor wafers and other industrial samples. This travel range and high-precision motorized control are normally only available on larger systems.

The H105NL/2 features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed.

The stage is compatible with Nikon NIS software (appropriate package required).

Several dedicated industrial sample holders are available: see the accessories tab for the full list.

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Data Sheet

Directly compatible with Nikon LV100/LV150 and software
Travel range supports 6-inch wafers on small industrial microscopes
Intelligent Scanning Technology™ (US Patent 7,330,307)
Additional clearance simplifies integration into OpenStand and other customized imaging systems
Excellent combination of speed and accuracy

Maximum Travel Range	154 mm x 154 mm
Minimum Step Size	0.04 µm
XY Repeatability	±0.7 µm, open loop
Load Capacity	20kg
Stepper Motor	4 phase, 1 A per phase micro stepping
Linear Slides	3 mm precision bearings
Drive Screws	Zero backlash, recirculating ball screws; 2 mm or 5 mm pitch
Uni-directional Repeatability	0.7 µm
Metric Accuracy per mm	0.15 µm
Squareness	70 arc seconds
Travel Range	154 x 154 mm
Minimum Step Size	0.04 µm
Recommended Speed	24 mms-1
Ball Screw	2 mm
Motor Type	Stepper: 200 SPR
Encoders	No