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ProScan H105N2F


Motorized Flat Top 6-inch Travel Stage For Upright Microscopy

The ProScan H105N2F is a motorized XY flat-top stage designed for upright industrial microscopes. 

It is fully customizable for integration into OEM devices but also mounts directly onto Nikon industrial microscopes and the Prior OpenStand-L platform. See the product compatibility tab for details.

With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers and other industrial samples.

The  H105N2F scans industrial samples reliably and efficiently. It features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity, together with a 2 mm ballscrew for speed

Its flat top plate allows easy access to the sample for loading and ensures compatibility with a wide range of optics

It is compatible with Nikon NIS Elements software (appropriate package required).

This is an ‘OEM & Batch Order’ product. For more information visit our FAQs section.


    • Easy to integrate into customized imaging solutions
    • Directly compatible with Nikon industrial microscopes and software
    • Aesthetic and user friendly flat top design
    • Travel range supports 6-inch wafers
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
Travel range 154 mm x 154 mm
Uni-directional repeatability < 0.9 µm
Bidirectional repeatability < 3.6 μm
Metric accuracy < 0.21 μm/mm
Full travel metric accuracy < 21.8 μm
Resolution 0.04 μm
Squareness 40 arcsec
Maximum velocity 40 mm/s
Maximum load 10 kg
Encoders No
Motor type 200 step
Screw pitch 2 mm
Weight 4.8 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes

H105N2F

Prior OpenStand-L
H105N2F Nikon L200N, L200ND, L300N, L300ND

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