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ProScan H105/2ZL


Motorized 6-inch Travel Stage For Zeiss Axiotron 2 Microscope

The ProScan H105/2ZL motorized XY stage is designed for the Zeiss Axiotron 2 upright industrial microscope.

With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.  

The H105/2ZL features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently.


    • Directly compatible with Zeiss Axiotron 2
    • Excellent combination of speed and accuracy
    • Travel range supports 6-inch wafers
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
Travel range 154 mm x 154 mm
Unidirectional repeatability <1.0 μm
Bidirectional repeatability <3.3 μm
Metric accuracy 0.13 μm/mm
Full travel metric accuracy <19.3 μm
Resolution 0.04 µm
Squareness <50 arcsec
Maximum velocity 60 mm/s
Maximum load 10 kg
Encoders No
Motor type 200 step
Screw pitch 2 mm
Weight 5 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes
H105/2ZL Zeiss Axiotron 2

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