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ProScan H105/2OL


Motorized 6-inch Travel Stage For Evident/Olympus MX Industrial Microscopes

The ProScan H105/2OL motorized XY stage is designed for Evident/Olympus industrial microscopes. See the product compatibility tab for details.

With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.  

The H105/2OL features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently.

It is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).  
 
Several dedicated industrial sample holders are available: see the accessories tab for the full list.


    • Directly compatible with Evident/Olympus industrial microscopes and software
    • Excellent combination of speed and accuracy
    • Travel range supports 6-inch wafers
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
    • Linear encoders for closed loop positional control
Travel range 154 mm x 154 mm
Unidirectional repeatability <1.0 μm
Bidirectional repeatability <3.3 μm
Metric accuracy 0.13 μm/mm
Full travel metric accuracy <19.3 μm
Resolution 0.04 µm
Squareness <50 arcsec
Maximum velocity 60 mm/s
Maximum load 10 kg
Encoders No
Motor type 200 step
Screw pitch 2 mm
Weight 5 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes
H105/2OL Evident/Olympus MX50, MX51, MX61, MX61L, MX63, MX63L

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