OSM-Z-400A Microscope Objective Scanner 400μm Stage

Datasheets

The OSM-Z-400A offers sub-nanometre positioning over 400μm of displacement with extremely low settling times.

  • 400μm travel range with sub- nanometer positioning resolution
  • Direct metrology with capacitive positioning sensor
  • Friction-free, high stiffness flexure guided precision system
  • Surface structure analysis
  • Autofocus systems
  • Confocal microscopy
  • Scanning Interferometry
  • NPC-D-5200 Digital Controller
  • NPC-D-6000 Series