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Home > Product Range > {:en}Queensgate Nanopositioning Devices & Sensors{:}{:zh}Queensgate纳米定位设备 & 传感器{:} > {:en}Nanopositioning Stages{:}{:zh}纳米定位平台{:} > NPS-Z-500B-UHV Long Range 500 Micron Stage

NPS-Z-500B-UHV Long Range 500 Micron Stage

QGNPS-Z-500B-UHV

Datasheets

NPS Z 500B UHV Datasheet

The NPS-Z-500B-UHV delivers over 100um full range at 80K at UHV. The stage is designed to operate in closed loop mode using capacitive positioning sensors. The advanced flexure design results in a highly linear device with outstanding resolution, repeatability, stiffness and stability. Low off-axis errors and a high resonant frequency further enhance the performance of this advanced design.

100μm closed loop displacement ay 80K in UHV
Highly parallel motion with minimal off-axis deviation
<1nm position noise 0.01% linearity 0.02% residual hysteresis
Customizable packages, vacuum and low temperature versions available

NPC-D-5200 Digital Controller
NPC-D-6000 Series

Category: Nanopositioning Stages Tag: Micron Stage

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