NPS-Z-500B-UHV Long Range 500 Micron Stage

Drawings and Documents

The NPS-Z-500B-UHV delivers over 100um full range at 80K at UHV. The stage is designed to operate in closed loop mode using capacitive positioning sensors. The advanced flexure design results in a highly linear device with outstanding resolution, repeatability, stiffness and stability. Low off-axis errors and a high resonant frequency further enhance the performance of  this advanced design.

  • 100μm closed loop displacement ay 80K in UHV
  • Highly parallel motion with minimal off-axis deviation
  • <1nm position noise 0.01% linearity 0.02% residual hysteresis
  • Customizable packages, vacuum and low temperature versions available
  • NPC-D-5200 Digital Controller
  • NPC-D-6000 Series