The NPS-X-5A Ultra Compact 5 Micron Stage has been specifically designed for applications requiring a compact, high speed, ultra-precision motion stage.
Its very small size makes it ideal for use in systems where space is limited. Sub-millisecond response time is ideal for applications high reliability and throughput are essential. A low moving mass and high stiffness combine to offer extremely high bandwidth.
The capacitive sensor design provides the sub-nanometer displacement measurement and closed-loop feedback over a range in excess of 6 microns. Flexure guidance offers high purity of motion, with parasitic motion reduced to less than 5 microradians. Combined with Queensgate’s digital closed-loop controllers, the NPS-X-5A can achieve sub-millisecond response and settle times.