NPS-X-500A Nanopositioning Stage

Datasheets

The NPS-X-500A is a single-axis piezo-nanopositioning stage with closed-loop travel range of 500μm. This ultra-compact stage has been specifically designed for high precision and quick response.

  • 500μm travel range with sub- nanometer positioning resolution
  • Direct metrology with capacitive positioning sensor
  • Friction-free, high stiffness flexure guided precision system
  • High resonant frequency of 250Hz
  • Queensgate dual sensor technology
  • Compact design-60mm x 60 mm x 20mm
  • Nanopositioning Interferometry
  • Microscopy
  • Biotechnology
  • Quality assurance testing
  • Semiconductor technology
  • NPC-D-5200 Digital Controller
  • NPC-D-6000 Series