NanoSensors – NZ Series


Queensgate’s ultimate sensor for thermal stability combines the low thermal expanson coefficient benefits of Zerodur and Super Invar in a single package.

The spacing of these two plates can be measured, using the appropriate electronic contoller, to better than 0.1nm, with a range up to 1.25mm, a frequency response of up to 10 kHz and linear to 0.02%. Unlike other measurement techniques, such as Strain Gauge, the NanoSensor is a non-contact method and so is free of hysteresis. No power is dissipated at the point of measurement.

By using ultra-low expansion coefficient materials and eliminating adhesives in their construction, NZ Series Nanosensors represent the ultimate in thermal stability. The omission of adhesives in construction makes these sensors particularly suitable for harsh thermal conditions such as cryogenic use. They are manufactured from Zerodur and Super Invar and are available in three sizes – NZB, NZC and NZD.

  • Sub-nanometer position resolution
  • Zero hysteresis
  • Linearity error down to 0.02%
  • Bandwidth up to 10 kHz
  • Ultra stable Super Invar/Zerodur construction
  • Vacuum and Radiation Hard options
  • Stage control
  • Microscopy
  • Structural deformation
  • Vibration control
  • Materials testing
  • Precision engineering
  • Metrology
  • Active optics
  • Precision beam steering
  • Thermal drift measurement