NanoSensors – NX Series

Drawings and Documents

Nanopositioning Sensor – NanoSensor for  the ultimate in position monitoring

The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor.

The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.

  • Sub-nanometer position resolution
  • Zero hysteresis
  • Linearity error down to 0.02%
  • Bandwidth up to 10 kHz
  • High thermal stability construction (Super invar, zerdur and ceramic options available)
  • UHV, Radiation, Cryogenic, Nonmagnetic, etc. Variants
  • Precision manufacturing
  • Metrology
  • Deformation measurements
  • Stain measurement (used on space station robotic arm and hand)
  • Stage control
  • Materials testing
  • Microscopy
  • Active Optics
  • Precision Beam Steering