Upright Industrial Microscope

Typical applications: Chuck/wafer inspection

CORE SYSTEM
OPTIONAL ACCESSORIES
 

The high precision 200mm wafer inspection system with Prior Proscan® (H116) motorized XY stage,  vacuum wafer chuck (HWC20V) and laser auto-focus system (LF210) maintains precise focus throughout the scanning operation. The Brightfield LED is included to provide high quality illumination.