{"id":385,"date":"2026-05-13T12:00:00","date_gmt":"2026-05-13T12:00:00","guid":{"rendered":"https:\/\/gk5l0g06kd.onrocket.site\/?post_type=news&p=385"},"modified":"2026-09-12T12:30:07","modified_gmt":"2026-09-12T12:30:07","slug":"flatter-more-accurate-wafer-positioning-from-queensgate","status":"publish","type":"news","link":"https:\/\/www.prior.com\/ja\/news\/flatter-more-accurate-wafer-positioning-from-queensgate\/","title":{"rendered":"Flatter, more accurate wafer positioning from Queensgate"},"content":{"rendered":"
Home<\/a><\/span> \u00bb News<\/a><\/span> \u00bb Flatter, more accurate wafer positioning from Queensgate<\/span><\/span><\/div>\n\n\n
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Flatter, more accurate wafer positioning from Queensgate<\/h1>\n\n\n\n

13.05.26<\/p>\n\n\n\n

The new WP120B Z-axis, tip-and-tilt piezo positioning stage for 300 mm (12”) wafers offers minimal off-axis errors for consistent focus and measurement accuracy. <\/b><\/span><\/span><\/span><\/p>\n\n\n\n

Queensgate has launched the latest of its piezo nanopositioning stages, the WP120B low-profile Z-axis, tip-and-tilt stage<\/a>.<\/span><\/span><\/span> It was developed in response to customer demands for improved roll and pitch errors in wafer piezo nanopositioning stages.<\/span><\/span><\/span><\/p>\n\n\n\n

The WP120B features parallel kinematic 3-point high-stiffness actuators, flexure guidance, high-bandwidth closed-loop control, and multipoint sub-nanometer-resolution capacitive displacement sensors directly measuring the moving platform. This has enabled a ~15x reduction in off-axis errors, from ~20 μrad to 2 μrad, with no loss of speed over the stage’s full 120 μm Z travel range. <\/span><\/span><\/span><\/p>\n\n\n\n

The flatness ensures consistent focus and improved confidence in measurement accuracy across a large surface area, making it ideal for inspecting 300 mm wafers. It is available with an adapter plate for the H112 heavy-duty industrial stage from Prior Scientific for high-precision X- and Y-axis motion with a 300 mm travel range. <\/span><\/span><\/span><\/p>\n\n\n\n

The WP120B is suitable for high-throughput applications where Z-axis speed and accuracy are vital: with Queensgate’s digital closed-loop controllers, its step-settle time is as low as 14 ms for a 1 μm step under an 8 kg load. Typical applications include:<\/span><\/span><\/span><\/p>\n\n\n\n