{"id":4206,"date":"2026-05-13T12:00:00","date_gmt":"2026-05-13T12:00:00","guid":{"rendered":"https:\/\/gk5l0g06kd.onrocket.site\/?post_type=news&#038;p=4206"},"modified":"2026-09-12T12:30:24","modified_gmt":"2026-09-12T12:30:24","slug":"flatter-more-accurate-wafer-positioning-from-queensgate","status":"publish","type":"news","link":"https:\/\/www.prior.com\/de\/news\/flatter-more-accurate-wafer-positioning-from-queensgate\/","title":{"rendered":"Pr\u00e4zisere Waferpositionierung von Queensgate"},"content":{"rendered":"<div class=\"yoast-breadcrumbs\"><span><span><a href=\"https:\/\/www.prior.com\/de\/\">Home<\/a><\/span> \u00bb <span><a href=\"https:\/\/www.prior.com\/de\/news\/\">News<\/a><\/span> \u00bb <span class=\"breadcrumb_last\" aria-current=\"page\">Pr\u00e4zisere Waferpositionierung von Queensgate<\/span><\/span><\/div>\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n\n<h1 class=\"wp-block-heading\">Pr\u00e4zisere Waferpositionierung von Queensgate<\/h1>\n\n\n\n<p class=\"wp-block-post-date wp-block-paragraph\">13.05.26<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><b>Der neue Piezo-Nanopositioniertisch WP120B mit Z-Achse und Tip-and-Tilt-Funktion f&uuml;r 300-mm-Wafer (12&quot;) bietet minimale Achsenfehler und sorgt so f&uuml;r gleichbleibende Fokus- und Messgenauigkeit.&nbsp; <\/b><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Queensgate hat sein neuestes Piezo-Nanopositionierger&auml;t vorgestellt:<a href=\"https:\/\/www.prior.com\/product\/wp120b-low-profile-tip-and-tilt-stage-for-300-mm-wafers\/\"> den flachen Tip-and-Tilt-Piezo-Tisch WP120B mit Z-Achse<\/a>. Das Ger&auml;t wurde als Antwort auf Kundenanforderungen nach minimierten Roll- und Pitch-Fehlern bei Piezo-Nanopositioniertischen f&uuml;r Wafer entwickelt.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Der WP120B verf&uuml;gt &uuml;ber parallelkinematische 3-Punkt-Aktuatoren mit hoher Steifigkeit, Flexurf&uuml;hrung, eine Closed-Loop-Regelung mit hoher Bandbreite sowie kapazitive Wegsensoren mit Sub-Nanometer-Aufl&ouml;sung an mehreren Punkten, die die Bewegung der Plattform direkt messen. Dadurch konnten die Off-Axis-Fehler um das ~15-fache von ~20 &mu;rad auf 2 &mu;rad reduziert werden, ohne dass es zu Geschwindigkeitseinbu&szlig;en &uuml;ber den gesamten 120-&mu;m-Z-Verfahrbereich des Tisches kommt.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Die Ebenheit gew&auml;hrleistet einen gleichm&auml;&szlig;igen Fokus und erh&ouml;htes Vertrauen in die Me&szlig;genauigkeit &uuml;ber eine gro&szlig;e Fl&auml;che, was das System ideal f&uuml;r die Inspektion von 300 mm-Wafern macht. Es ist mit einer Adapterplatte f&uuml;r den Hochleistungs-XY-Positioniertisch H112 von Prior Scientific erh&auml;ltlich, die hochpr&auml;zise X- und Y-Achsenbewegungen mit einem Verfahrbereich von 300 mm erm&ouml;glicht.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Der WP120B eignet sich f&uuml;r Anwendungen mit hohem Durchsatz, bei denen Geschwindigkeit und Genauigkeit der Z-Achse entscheidend sind: Mit den digitalen Closed-Loop-Reglern von Queensgate betr&auml;gt seine Schritt-Einstellzeit nur 14 ms f&uuml;r einen 1-&mu;m-Schritt unter einer Last von 8 kg. Typische Anwendungen sind:&nbsp;<\/p>\n\n\n\n<ul class=\"wp-block-list\">\r\n\t<li>Waferinspektion und Fehlererkennung&nbsp;<\/li>\r\n\t<li>Chipverifizierung&nbsp;<\/li>\r\n\t<li>Oberfl&auml;chenstrukturierung&nbsp;<\/li>\r\n\t<li>Interferometrie und Messtechnik&nbsp;<\/li>\r\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Erfahren Sie mehr auf <a href=\"https:\/\/www.nanopositioning.com\/product\/wp120b-low-profile-tip-and-tilt-stage-for-300-mm-wafers\" target=\"_blank\">nanopositioning.com<\/a><\/p>\n\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/05\/WP120B-low-profile-wafer-stage_704x540.png\" alt=\"WP120B tip\/tilt and Z-axis nanopositioning stage for 300 mm wafers.\" class=\"wp-image-410\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/05\/WP120B-low-profile-wafer-stage_704x540.png 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/05\/WP120B-low-profile-wafer-stage_704x540-300x230.png 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-group alignfull has-background\" style=\"background-color:#f5f5f5;padding-top:70px;padding-right:4%;padding-bottom:70px;padding-left:4%\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-container-core-group-is-layout-7a0b55d5 wp-block-group-is-layout-constrained\">\n<h2 class=\"wp-block-heading has-text-align-center\">Mehr Neuigkeiten<\/h2>\n\n\n\n<div style=\"height:30px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><a href=\"\/de\/news\/new-compact-single-axis-controller-offers-premium-performance-at-a-cost-effective-price\/\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/ES12ZETTLcontrollerwithgreenlightonwebversion_704x540.jpg\" alt=\"New compact single-axis controller offers premium performance at a cost-effective price\" class=\"wp-image-7376\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/ES12ZETTLcontrollerwithgreenlightonwebversion_704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/ES12ZETTLcontrollerwithgreenlightonwebversion_704x540-300x230.jpg 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/a><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">19.08.26<\/p>\n\n\n\n<h3 class=\"wp-block-heading has-medium-font-size\"><a href=\"\/de\/news\/new-compact-single-axis-controller-offers-premium-performance-at-a-cost-effective-price\/\">New compact single-axis controller offers premium performance at a cost-effective price<\/a><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"\/de\/news\/new-compact-single-axis-controller-offers-premium-performance-at-a-cost-effective-price\/\"><strong>Erfahren Sie mehr<\/strong><\/a><\/p>\n<\/div>\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><a href=\"\/de\/news\/new-8-position-filter-cube-turret-offers-rapid-multi-channel-imaging-for-fluorescence-microscopy\/\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108FC-filter-cube-turret-PR704x540.jpg\" alt=\"Neuer 8-Positionen-Filterw\u00fcrfelrevolver bietet schnelles Multi-Channel-Imaging f\u00fcr die Fluoreszenzmikroskopie\" class=\"wp-image-7322\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108FC-filter-cube-turret-PR704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108FC-filter-cube-turret-PR704x540-300x230.jpg 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/a><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">25.03.26<\/p>\n\n\n\n<h3 class=\"wp-block-heading has-medium-font-size\"><a href=\"\/de\/news\/new-8-position-filter-cube-turret-offers-rapid-multi-channel-imaging-for-fluorescence-microscopy\/\">Neuer 8-Positionen-Filterw\u00fcrfelrevolver bietet schnelles Multi-Channel-Imaging f\u00fcr die Fluoreszenzmikroskopie<\/a><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"\/de\/news\/new-8-position-filter-cube-turret-offers-rapid-multi-channel-imaging-for-fluorescence-microscopy\/\"><strong>Erfahren Sie mehr<\/strong><\/a><\/p>\n<\/div>\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><a href=\"\/de\/news\/new-direct-drive-heavy-duty-piezo-nanopositioning-stage-for-metrology-and-precision-manufacturing\/\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/NPS-X-60D-webversion-_704x540.jpg\" alt=\"Neuer direkt angetriebener, hochbelastbarer Piezo-Nanopositioniertisch f\u00fcr Messtechnik und Pr\u00e4zisionsfertigung\" class=\"wp-image-9959\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/NPS-X-60D-webversion-_704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/NPS-X-60D-webversion-_704x540-300x230.jpg 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/a><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">26.02.26<\/p>\n\n\n\n<h3 class=\"wp-block-heading has-medium-font-size\"><a href=\"\/de\/news\/new-direct-drive-heavy-duty-piezo-nanopositioning-stage-for-metrology-and-precision-manufacturing\/\">Neuer direkt angetriebener, hochbelastbarer Piezo-Nanopositioniertisch f\u00fcr Messtechnik und Pr\u00e4zisionsfertigung<\/a><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"\/de\/news\/new-direct-drive-heavy-duty-piezo-nanopositioning-stage-for-metrology-and-precision-manufacturing\/\"><strong>Erfahren Sie mehr<\/strong><\/a><\/p>\n<\/div>\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><a href=\"\/de\/news\/prior-scientific-launches-purefocus690-advanced-hardware-laser-autofocus-for-raman-and-infrared-microscopy\/\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/PureFocus690PRPicture_704x540_1.png\" alt=\"Prior Scientific bringt PureFocus690 auf den Markt: Fortschrittlicher Hardware-Autofokus f\u00fcr Raman- und Infrarot-Mikroskopie\" class=\"wp-image-10022\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/PureFocus690PRPicture_704x540_1.png 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/PureFocus690PRPicture_704x540_1-300x230.png 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/a><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">08.01.26<\/p>\n\n\n\n<h3 class=\"wp-block-heading has-medium-font-size\"><a href=\"\/de\/news\/prior-scientific-launches-purefocus690-advanced-hardware-laser-autofocus-for-raman-and-infrared-microscopy\/\">Prior Scientific bringt PureFocus690 auf den Markt: Fortschrittlicher Hardware-Autofokus f\u00fcr Raman- und Infrarot-Mikroskopie<\/a><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"\/de\/news\/prior-scientific-launches-purefocus690-advanced-hardware-laser-autofocus-for-raman-and-infrared-microscopy\/\"><strong>Erfahren Sie mehr<\/strong><\/a><\/p>\n<\/div>\n<\/div>\n<\/div><\/div>\n\n","protected":false},"excerpt":{"rendered":"<p>Der neue Piezo-Nanopositioniertisch WP120B mit Z-Achse und Tip-and-Tilt-Funktion f\u00fcr 300-mm-Wafer (12&#8243;) bietet minimale Achsenfehler und sorgt so f\u00fcr gleichbleibende Fokus- und Messgenauigkeit.<\/p>\n","protected":false},"featured_media":410,"template":"","meta":{"_acf_changed":false,"_genesis_hide_title":false,"_genesis_hide_breadcrumbs":false,"_genesis_hide_singular_image":false,"_genesis_hide_footer_widgets":false,"_genesis_custom_body_class":"","_genesis_custom_post_class":"","_genesis_layout":"","footnotes":""},"class_list":["post-4206","news","type-news","status-publish","has-post-thumbnail","entry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.6 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Pr\u00e4zisere Waferpositionierung von Queensgate | PriorScientific<\/title>\n<meta name=\"description\" content=\"Der neue Piezo-Nanopositioniertisch WP120B mit Z-Achse und Tip-and-Tilt-Funktion f\u00fcr 300-mm-Wafer (12&quot;) bietet minimale Achsenfehle...\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, 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