{"id":3736,"date":"2026-08-15T11:57:00","date_gmt":"2026-08-15T11:57:00","guid":{"rendered":"https:\/\/gk5l0g06kd.onrocket.site\/?post_type=application&#038;p=3736"},"modified":"2026-09-12T11:20:26","modified_gmt":"2026-09-12T11:20:26","slug":"automated-microscopy-semiconductor-inspection","status":"publish","type":"application","link":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/","title":{"rendered":"Automatisierte Bildgebung f\u00fcr die Halbleiterinspektion"},"content":{"rendered":"<div class=\"yoast-breadcrumbs\"><span><span><a href=\"https:\/\/www.prior.com\/de\/\">Home<\/a><\/span> \u00bb <span><a href=\"https:\/\/www.prior.com\/de\/applications\/\">Applications<\/a><\/span> \u00bb <span class=\"breadcrumb_last\" aria-current=\"page\">Automatisierte Bildgebung f\u00fcr die Halbleiterinspektion<\/span><\/span><\/div>\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n\n<h1 class=\"wp-block-heading\">Automatisierte Bildgebung f\u00fcr die Halbleiterinspektion<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">Steigerung des Durchsatzes und Sicherung der Qualit&#228;t durch schnelle, hochpr&#228;zise Positionierung und Autofokus<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Die Pr&uuml;fung von Halbleitern erfordert extreme Pr&auml;zision und Zuverl&auml;ssigkeit, denn schon kleinste Fehler k&ouml;nnen die Leistung des Chips beeintr&auml;chtigen.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Da die Merkmale der Wafer im Nanometerbereich gemessen werden, m&uuml;ssen die Pr&uuml;fsysteme eine Genauigkeit im Submikrometerbereich, eine konstante Wiederholbarkeit und eine stabile Positionierung bieten.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Eine fortschrittliche Bildgebung in Verbindung mit einer Vibrationskontrolle ist f&uuml;r die effektive Erkennung von Fehlern unerl&auml;sslich. Die Automatisierung dieser Prozesse erh&ouml;ht nicht nur die Genauigkeit, sondern verbessert auch die Effizienz, reduziert menschliche Fehler und erh&ouml;ht den Durchsatz in der Gro&szlig;serienfertigung.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Es kann eine breite Palette von Bildgebungsverfahren eingesetzt werden. Einige Beispiele und Anwendungen sind:<br \/>\r\n&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Erkennen von Oberfl&auml;chendefekten:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\r\n\t<li>Hellfeld- und Dunkelfeldmikroskopie<\/li>\r\n\t<li><a href=\"https:\/\/www.prior.com\/applications\/atomic-force-microscopy\">Rasterkraftmikroskopie<\/a><\/li>\r\n\t<li><a href=\"https:\/\/www.prior.com\/applications\/confocal-super-resolution-microscopy\">Konfokale Mikroskopie<\/a><\/li>\r\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Untersuchung der inneren Struktur der Wafer:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\r\n\t<li><a href=\"https:\/\/www.prior.com\/applications\/raman-and-infrared-microscopy-for-chemical-mapping?utm_source=newsletter&amp;utm_medium=email&amp;utm_campaign=PF690Distributors\">Infrarot-Mikroskopie<\/a><\/li>\r\n\t<li>SWIR (Kurzwellen-Infrarot) Bildgebung<\/li>\r\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Herausforderungen f&uuml;r die Halbleiterinspektion<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">Pr&auml;zise Abbildung von Wafern im Nanometerbereich ohne Geschwindigkeitseinbu&szlig;en<\/h4>\n\n\n\n<p class=\"wp-block-paragraph\">W&auml;hrend die Details eines Halbleiterwafers klein sind, sind die Wafer selbst gro&szlig; &#8211; bis zu 300 mm (12 Zoll) im Durchmesser. Das Bildgebungssystem muss die Probe schnell bewegen k&ouml;nnen, um den gesamten Bereich abzudecken, und gleichzeitig eine Aufl&ouml;sung im Sub-Nanometer-Bereich bieten.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Das Gewicht ist eine weitere Herausforderung. F&uuml;r die Bildgebung werden die Wafer oft in Tr&auml;gern, Kassetten, Vakuumspannvorrichtungen oder Geh&auml;usen montiert, die zus&auml;tzliches Gewicht verursachen. F&uuml;r die hochaufl&ouml;sende Bildgebung k&ouml;nnen einige Ger&auml;te &#8211; wie z. B. schwere Objektive &#8211; direkt auf dem Tisch montiert werden. Das Gesamtgewicht betr&auml;gt dann oft mehrere Kilogramm.<br \/>\r\n&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Prior Scientific L&ouml;sung:<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong><em>ProScan H112 Motorisierter Tisch mit Queensgate WP120A Einachsiger Wafer-Piezotisch<\/em><\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Der <a href=\"https:\/\/priorsil.sharepoint.com\/product\/wp120a-wafer-stage\">WP120A Piezotisch von Queensgate<\/a> f&uuml;r 300 mm Wafer, hat einen Z-Achsen-Verfahrweg von 120 &micro;m und eine Wiederholbarkeit von 5,5 nm. Er ist kompatibel mit dem <a href=\"https:\/\/priorsil.sharepoint.com\/product\/proscan-h112-2st-large-format-stage\">motorisierten Gro&szlig;format-Tisch H112<\/a> von Prior, der einen XY-Verfahrweg von 302 mm hat. Der H112 verf&uuml;gt &uuml;ber eine &nbsp; &nbsp; &nbsp; &nbsp;2 mm-Kugelumlaufspindel f&uuml;r mehr Geschwindigkeit und die Intelligent Scanning Technology (IST) f&uuml;r mehr Linearit&auml;t und Genauigkeit.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><em><strong>Hochbelastbare, hochpr&auml;zise Piezotische von Queensgate<\/strong><\/em><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Die <a href=\"https:\/\/www.nanopositioning.com\/product\/nps-x-60d-and-nps-x-100d-high-load-direct-drive-nanopositioning-stages\">NPS-X-60D, NPS-X-100D<\/a> und <a href=\"https:\/\/www.nanopositioning.com\/product\/nps-x-250b-nps-z-250b-high-load-250-%ce%bcm-piezo-stage-with-capacitive-sensor\">NPS-Z-250B<\/a> sind hochbelastbare Piezotische zur Nanopositionierung. Wenn sie f&uuml;r die vertikale Bewegung (Z-Achse) konfiguriert sind, positionieren und halten sie pr&auml;zise die schweren optischen Baugruppen, die f&uuml;r die Halbleiterpr&uuml;fung verwendet werden.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Die Flexure Festk&ouml;rpergelenkf&uuml;hrungen und die rauscharmen kapazitiven Sensoren sorgen f&uuml;r pr&auml;zise Positionierung und Stabilit&auml;t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Erfahren Sie mehr &uuml;ber Queensgate L&ouml;sungen f&uuml;r die <a href=\"https:\/\/www.nanopositioning.com\/nanopositioning-applications-and-industries\/hard-disk-drive-testing-and-grading\">Halbleiter- und Festplatteninspektion<\/a>.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong><a href=\"https:\/\/www.prior.com\/de\/automated-imaging-systems\/openstand-large-format-microscope\/\" target=\"_blank\">OpenStand-L: Gro&szlig;formatige Mikroskopie-Plattform von Prior Scientific<\/a><\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Da jede Halbleiterfabrik einzigartig ist, wird oft ein komplettes, ma&szlig;geschneidertes Inspektionssystem ben&ouml;tigt. Der OpenStand-L ist modular aufgebaut und kompatibel mit den motorisierten Tischen und anderen Komponenten von Prior, den Piezo-Nanopositioniertischen von Queensgate und einer Vielzahl von Drittanbieter-Integrationen.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Scharfe Sch&auml;rfe auf der gesamten Wafer-Oberfl&auml;che beibehalten<\/h4>\n\n\n\n<p class=\"wp-block-paragraph\">Siliziumwafer sind nicht perfekt flach und k&ouml;nnen sowohl innerhalb des Wafers als auch aufgrund von Erhebungen in der Strukturierung Dickenunterschiede aufweisen. Die Bildgebungssysteme m&uuml;ssen w&auml;hrend der Inspektion st&auml;ndig neu fokussieren, was den gesamten Prozess verlangsamen kann.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Prior Scientific L&ouml;sung:<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong><a href=\"https:\/\/www.prior.com\/de\/imaging-components\/laser-autofocus\/\">PureFocus850 und PureFocus690 Laser-Autofokus-Systeme<\/a><\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">PureFocus passt sich in Echtzeit an unebene Oberfl&auml;chen oder ungleichm&auml;&szlig;ige Reflektivit&auml;ten an &#8211; wie z.B. die Oberfl&auml;che eines Siliziumwafers. Der Linienmodus des PureFocus sorgt f&uuml;r Stabilit&auml;t bei industriellen Proben, indem er den Fokus &uuml;ber das gesamte Sichtfeld mittelt.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Durch die Erkennung von Grenzfl&auml;chen wird die richtige voreingestellte Oberfl&auml;che anvisiert, wenn die Probe mehrere reflektierende Schichten aufweist, was zeitaufw&auml;ndige Neukalibrierungen &uuml;berfl&uuml;ssig macht.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">FALLSTUDIE: <a href=\"https:\/\/www.prior.com\/de\/blog\/rapid-scanning-of-silicon-carbide-wafers-using-prior-scientific-s-purefocus-850-autofocus\/\" target=\"_blank\">Schnelles Scannen von Siliziumkarbid-Wafern mit dem PureFocus 850 Autofocus von Prior Scientific<\/a><\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Umweltfaktoren k&ouml;nnen die Messstabilit&auml;t beeintr&auml;chtigen<\/h4>\n\n\n\n<p class=\"wp-block-paragraph\">Die Inspektion erfolgt oft unter sorgf&auml;ltig kontrollierten Bedingungen &#8211; zum Beispiel im Vakuum &#8211; um Verunreinigungen zu verhindern und optische Verzerrungen zu verringern. <a href=\"https:\/\/www.prior.com\/blog\/choosing-nanopositioning-stages-and-systems-how-materials-and-environment-affect-precision\">Temperaturschwankungen wirken sich auf die Materialien aus<\/a>, daher ist es wichtig, Nanopositionierungsprodukte mit geringer W&auml;rmeausdehnung zu w&auml;hlen. Eine wirksame Vibrationskontrolle ist ebenfalls von Bedeutung.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Prior Scientific L&ouml;sung:<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><em><strong>Viele Piezotische f&uuml;r die Nanopositionierung von Queensgate<\/strong><\/em> sind f&uuml;r den Betrieb unter UHV-Bedingungen ausgelegt. Sowohl der <a href=\"https:\/\/www.nanopositioning.com\/product\/nps-xyp-250q-300-mm-wafer-mask-alignment-stage\">Queensgate NPS-XYP-250Q 300 mm Wafer Mask Alignment Stage<\/a> als auch der <a href=\"https:\/\/priorsil.sharepoint.com\/product\/wp120a-wafer-stage\">WP120A Wafertisch<\/a> arbeiten im Hochvakuum und haben eine geringe thermische Ausdehnung, wodurch sie f&uuml;r eine Vielzahl von Halbleiteranwendungen geeignet sind.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><em><strong>Passive Vibrationskontrolle an Arbeitspl&auml;tzen und optischen Tischen.<\/strong><\/em><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"https:\/\/kineticsystems.com\/\">Kinetic Systems bietet Vibrationskontrolle f&uuml;r Automatisierungs- und Pr&uuml;fger&auml;te an<\/a>. Neben Standard-Arbeitspl&auml;tzen und Kontrollplattformen entwickelt das Unternehmen gemeinsam mit seinen Kunden ma&szlig;geschneiderte Produkte f&uuml;r spezielle Anwendungen in der Halbleiterindustrie.<\/p>\n\n\n\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button is-style-outline is-style-outline--1\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/www.prior.com\/de\/contact\/\">Jetzt anfragen<\/a><\/div>\n<\/div>\n\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg\" alt=\"Colourful image of etched silicon wafers reflecting patterns of light. \" class=\"wp-image-4551\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540-300x230.jpg 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-genesis-blocks-gb-container alignfull gb-block-container\" style=\"padding-left:4%;padding-right:4%;padding-bottom:8%;padding-top:8%\"><div class=\"gb-container-inside\"><div class=\"gb-container-content\" style=\"max-width:1400px\"><style>\/**\n * Products Slider\n *\/\n\n.products-slider {\n\tposition: relative;\n\twidth: 100%;\n\tpadding: 35px 0 20px;\n}\n\n\n\/**\n * Heading\n *\/\n\n.products-slider__heading {\n\tmargin: 0 0 45px;\n\n\tfont-size: 25px;\n\tline-height: 1.2;\n\tfont-weight: 700;\n\n\tcolor: #111;\n}\n\n\n\/**\n * Carousel\n *\/\n\n.products-slider__carousel {\n\tposition: relative;\n}\n\n\n\/**\n * Viewport\n *\/\n\n.products-slider__viewport {\n\toverflow: hidden;\n\twidth: 100%;\n}\n\n\t..products-slider__arrow:hover {\n\t\tcolor: white;\n\t}\n\/**\n * Track\n *\/\n\n.products-slider__track {\n\tdisplay: flex;\n\n\tmargin-left: -10px;\n\tmargin-right: -10px;\n\n\ttransform: translateX(0);\n\n\ttransition: transform 0.45s ease;\n}\n\n\n\/**\n * Slides\n *\n * Desktop = 4 visible.\n *\/\n\n.products-slider__slide {\n\tflex: 0 0 25%;\n\n\tmin-width: 0;\n\n\tpadding: 0 10px;\n\n\tbox-sizing: border-box;\n}\n\n\n\/**\n * Product\n *\/\n\n.products-slider__product {\n\tdisplay: block;\n\n\tcolor: #111;\n\ttext-decoration: none;\n}\n\n.products-slider__product:hover,\n.products-slider__product:focus {\n\tcolor: #111;\n\ttext-decoration: none;\n}\n\n\n\/**\n * Image area\n *\/\n\n.products-slider__image {\n\tposition: relative;\n\n\tdisplay: flex;\n\talign-items: center;\n\tjustify-content: center;\n\n\twidth: 100%;\n\taspect-ratio: 1 \/ 0.94;\n\n\toverflow: hidden;\n\n\t\n}\n\n\n\/**\n * Product image\n *\/\n\n.products-slider__image img {\n\tdisplay: block;\n\n\twidth: 100%;\n\theight: 100%;\n\n\tobject-fit: contain;\n\n\ttransition: transform 0.3s ease;\n}\n\n\n.products-slider__product:hover .products-slider__image img {\n\ttransform: scale(1.025);\n}\n\n\n\/**\n * Product title\n *\/\n\n.products-slider__title {\n\tmargin: 25px 0 0;\n\tpadding: 0 0 13px;\n\n\tmin-height: 52px;\n\n\tborder-bottom: 1px solid #c7c7c7;\n\n\tfont-size: 18px;\n\tline-height: 1.3;\n\tfont-weight: 700;\n\n\tcolor: #111;\n}\n\n\n\/**\n * Slider arrows\n *\/\n\n.products-slider__arrow {\n\tposition: absolute;\n\tz-index: 10;\n\n\ttop: 42%;\n\n\tdisplay: flex;\n\talign-items: center;\n\tjustify-content: center;\n\n\twidth: 44px;\n\theight: 70px;\n\n\tpadding: 0;\n\n\tborder: 0;\n\n\tbackground: transparent;\n\n\tcolor: #22ae6f;\n\n\tfont-size: 52px;\n\tfont-weight: 200;\n\tline-height: 1;\n\n\tcursor: pointer;\n\n\ttransform: translateY(-50%);\n\n\ttransition:\n\t\topacity 0.2s ease,\n\t\tcolor 0.2s ease;\n}\n\n\n.products-slider__arrow--prev {\n\tleft: -65px;\n}\n\n\n.products-slider__arrow--next {\n\tright: -65px;\n}\n\n\n.products-slider__arrow:hover {\n\tcolor: #008d55;\n}\n\n\n.products-slider__arrow:disabled {\n\topacity: 0.2;\n\tcursor: default;\n}\n\n\n\/**\n * Dots\n *\/\n\n.products-slider__dots {\n\tdisplay: flex;\n\tjustify-content: center;\n\talign-items: center;\n\n\tgap: 7px;\n\n\tmin-height: 20px;\n\n\tmargin-top: 12px;\n}\n\n\n.products-slider__dot {\n\twidth: 4px;\n\theight: 4px;\n\n\tpadding: 0;\n\n\tborder: 0;\n\tborder-radius: 50%;\n\n\tbackground: #d5d5d5;\n}\n\n\n.products-slider__dot.is-active {\n\tbackground: #7d7d7d;\n}\n\n\n\/**\n * Button\n *\/\n\n.products-slider__button-wrap {\n\tdisplay: flex;\n\tjustify-content: center;\n\n\tmargin-top: 20px;\n}\n\n\n.products-slider__button {\n\tdisplay: inline-flex;\n\talign-items: center;\n\tjustify-content: center;\n\n\tmin-width: 215px;\n\n\tpadding: 17px 35px;\n\n\tborder-radius: 4px;\n\n\tbackground: #18a866;\n\tcolor: #fff;\n\n\tfont-size: 15px;\n\tline-height: 1;\n\tfont-weight: 600;\n\n\ttext-decoration: none;\n\n\ttransition: background-color 0.2s ease;\n}\n\n\n.products-slider__button:hover,\n.products-slider__button:focus {\n\tbackground: #078c50;\n\tcolor: #fff;\n\n\ttext-decoration: none;\n}\n\n\n\/**\n * Empty editor state\n *\/\n\n.products-slider__empty {\n\tpadding: 30px;\n\n\tbackground: #f2f2f2;\n\n\ttext-align: center;\n}\n\n\n\/**\n * Tablet\n *\n * 2 products.\n *\/\n\n@media (max-width: 1000px) {\n\n\t.products-slider__slide {\n\t\tflex-basis: 50%;\n\t}\n\n\t.products-slider__arrow--prev {\n\t\tleft: -35px;\n\t}\n\n\t.products-slider__arrow--next {\n\t\tright: -35px;\n\t}\n\n}\n\n\n\/**\n * Mobile\n *\n * 1 product.\n *\/\n\n@media (max-width: 600px) {\n\n\t.products-slider {\n\t\tpadding-top: 25px;\n\t}\n\n\t.products-slider__heading {\n\t\tmargin-bottom: 25px;\n\n\t\tfont-size: 22px;\n\t}\n\n\t.products-slider__slide {\n\t\tflex-basis: 100%;\n\t}\n\n\t.products-slider__track {\n\t\tmargin-left: 0;\n\t\tmargin-right: 0;\n\t}\n\n\t.products-slider__slide {\n\t\tpadding: 0;\n\t}\n\n\t.products-slider__arrow {\n\t\ttop: 42%;\n\n\t\twidth: 35px;\n\n\t\tfont-size: 44px;\n\n\t\tbackground: rgba(255, 255, 255, 0.85);\n\t}\n\n\t.products-slider__arrow--prev {\n\t\tleft: 5px;\n\t}\n\n\t.products-slider__arrow--next {\n\t\tright: 5px;\n\t}\n\n\t.products-slider__title {\n\t\tfont-size: 18px;\n\t}\n\n\t}<\/style>\n<section\n\tid=\"products-slider-block_80db9fff2cbde8b910c92a4f90f27e11\"\n\tclass=\"products-slider\"\n>\n\n\t\n\t\t<h2 class=\"products-slider__heading\">\n\t\t\tVerwandte Produkte\t\t<\/h2>\n\n\t\n\n\t\n\t\t<div class=\"products-slider__carousel\">\n\n\t\t\t\n\n\t\t\t<div class=\"products-slider__viewport\">\n\n\t\t\t\t<div class=\"products-slider__track\">\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"products-slider__slide\">\n\n\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\tclass=\"products-slider__product\"\n\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/product\/proscan-h112-2st-large-format-stage\/\"\n\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t<div class=\"products-slider__image\">\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"341\" height=\"320\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/H112stage-tile_341x320.png\" class=\"attachment-large size-large wp-post-image\" alt=\"H112\/2ST Large Format Motorized XY Stage\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/H112stage-tile_341x320.png 341w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/H112stage-tile_341x320-300x282.png 300w\" sizes=\"auto, (max-width: 341px) 100vw, 341px\" \/>\n\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t<h3 class=\"products-slider__title\">\n\t\t\t\t\t\t\t\t\tProScan H112\/2ST Large Format Motorized XY Stage\t\t\t\t\t\t\t\t<\/h3>\n\n\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"products-slider__slide\">\n\n\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\tclass=\"products-slider__product\"\n\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/product\/wp120a-wafer-stage\/\"\n\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t<div class=\"products-slider__image\">\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"341\" height=\"320\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/wafer-z-stage-with-wafer-tile-1.png\" class=\"attachment-large size-large wp-post-image\" alt=\"Piezo z-axis stage for semiconductor inspection with a 12-inch silicon wafer.\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/wafer-z-stage-with-wafer-tile-1.png 341w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/wafer-z-stage-with-wafer-tile-1-300x282.png 300w\" sizes=\"auto, (max-width: 341px) 100vw, 341px\" \/>\n\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t<h3 class=\"products-slider__title\">\n\t\t\t\t\t\t\t\t\tWP120A 12-inch Single Axis Wafer Piezo Stage\t\t\t\t\t\t\t\t<\/h3>\n\n\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"products-slider__slide\">\n\n\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\tclass=\"products-slider__product\"\n\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/product\/purefocus-690-laser-autofocus-system\/\"\n\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t<div class=\"products-slider__image\">\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"341\" height=\"320\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/purefocus-690-laser-autofocus-main-tile-1.jpg\" class=\"attachment-large size-large wp-post-image\" alt=\"PureFocus690 hardware laser autofocus system on a grey background.\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/purefocus-690-laser-autofocus-main-tile-1.jpg 341w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/purefocus-690-laser-autofocus-main-tile-1-300x282.jpg 300w\" sizes=\"auto, (max-width: 341px) 100vw, 341px\" \/>\n\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t<h3 class=\"products-slider__title\">\n\t\t\t\t\t\t\t\t\tPureFocus\u2122690 Laser Autofocus System\t\t\t\t\t\t\t\t<\/h3>\n\n\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t<\/div>\n\n\t\t\t<\/div>\n\n\n\t\t\t\n\t\t<\/div>\n\n\n\t\t\n\t\t\t<div class=\"products-slider__button-wrap\">\n\n\t\t\t\t<a\n\t\t\t\t\tclass=\"products-slider__button\"\n\t\t\t\t\thref=\"\/de\/imaging-components\"\n\t\t\t\t\ttarget=\"_self\"\n\t\t\t\t\t\t\t\t\t>\n\t\t\t\t\tView All Products\t\t\t\t<\/a>\n\n\t\t\t<\/div>\n\n\t\t\n\n\t\n<\/section><\/div><\/div><\/div>\n\n\n\n<div class=\"wp-block-genesis-blocks-gb-container alignfull gb-block-container\" style=\"background-color:#ededed;padding-left:4%;padding-right:4%;padding-bottom:8%;padding-top:8%\"><div class=\"gb-container-inside\"><div class=\"gb-container-content\" style=\"max-width:1400px\"><style>\/**\n * Article Slider\n *\/\n\n.article-slider {\n\tposition: relative;\n\n\twidth: 100%;\n\n\tpadding: 35px 0 20px;\n}\n\n\n\/**\n * Heading\n *\/\n\n.article-slider__heading {\n\tmargin: 0 0 45px;\n\n\tfont-size: 25px;\n\tline-height: 1.2;\n\tfont-weight: 700;\n\n\tcolor: #111;\n}\n\n\n\/**\n * Carousel\n *\/\n\n.article-slider__carousel {\n\tposition: relative;\n}\n\n\n\/**\n * Viewport\n *\/\n\n.article-slider__viewport {\n\twidth: 100%;\n\toverflow: hidden;\n}\n\n\n\/**\n * Track\n *\/\n\n.article-slider__track {\n\tdisplay: flex;\n\n\tmargin-left: -10px;\n\tmargin-right: -10px;\n\n\ttransform: translateX(0);\n\n\ttransition: transform 0.45s ease;\n}\n\n\n\/**\n * Slides\n *\n * Desktop = 4.\n *\/\n\n.article-slider__slide {\n\tflex: 0 0 25%;\n\n\tmin-width: 0;\n\n\tpadding: 0 10px;\n\n\tbox-sizing: border-box;\n}\n\n\n\/**\n * Card\n *\/\n\n.article-slider__card {\n\tdisplay: flex;\n\tflex-direction: column;\n\n\theight: 100%;\n\tmin-height: 535px;\n\n\toverflow: hidden;\n\n\tbackground: #fff;\n\n\tborder-radius: 4px;\n}\n\n\n\/**\n * Image\n *\/\n\n.article-slider__image {\n\tdisplay: block;\n\n\twidth: 100%;\n\taspect-ratio: 1.32 \/ 1;\n\n\toverflow: hidden;\n\n\tbackground: #e8e8e8;\n\n\ttext-decoration: none;\n}\n\n\n.article-slider__image img {\n\tdisplay: block;\n\n\twidth: 100%;\n\theight: 100%;\n\n\tobject-fit: cover;\n\n\ttransition: transform 0.3s ease;\n}\n\n\n.article-slider__image:hover img {\n\ttransform: scale(1.025);\n}\n\n\n\/**\n * Content\n *\/\n\n.article-slider__content {\n\tdisplay: flex;\n\tflex: 1;\n\tflex-direction: column;\n\n\tpadding: 48px 48px 42px;\n}\n\n\n\/**\n * Date\n *\/\n\n.article-slider__date {\n\tmargin-bottom: 20px;\n\n\tcolor: #0aaa62;\n\n\tfont-size: 16px;\n\tline-height: 1.2;\n\tfont-weight: 700;\n}\n\n\n\/**\n * Title\n *\/\n\n.article-slider__title {\n\tmargin: 0;\n\n\tfont-size: 18px;\n\tline-height: 1.25;\n\tfont-weight: 700;\n}\n\n\n.article-slider__title a {\n\tcolor: #111;\n\ttext-decoration: none;\n}\n\n\n.article-slider__title a:hover,\n.article-slider__title a:focus {\n\tcolor: #0aaa62;\n\n\ttext-decoration: none;\n}\n\n\n\/**\n * View Article\n *\/\n\n.article-slider__cta {\n\tdisplay: inline-flex;\n\talign-items: center;\n\n\tgap: 10px;\n\n\tmargin-top: auto;\n\tpadding-top: 45px;\n\n\tcolor: #0aaa62;\n\n\tfont-size: 16px;\n\tfont-weight: 700;\n\tline-height: 1.2;\n\n\ttext-decoration: none;\n}\n\n\n.article-slider__cta span {\n\tfont-size: 19px;\n}\n\n\n.article-slider__cta:hover,\n.article-slider__cta:focus {\n\tcolor: #07884d;\n\n\ttext-decoration: none;\n}\n\n\n\/**\n * Slider arrows\n *\/\n\n.article-slider__arrow {\n\tposition: absolute;\n\tz-index: 10;\n\n\ttop: 43%;\n\n\tdisplay: flex;\n\talign-items: center;\n\tjustify-content: center;\n\n\twidth: 44px;\n\theight: 70px;\n\n\tpadding: 0;\n\n\tborder: 0;\n\n\tbackground: transparent;\n\n\tcolor: #22ae6f;\n\n\tfont-size: 52px;\n\tfont-weight: 200;\n\tline-height: 1;\n\n\tcursor: pointer;\n\n\ttransform: translateY(-50%);\n}\n\n\n.article-slider__arrow--prev {\n\tleft: -65px;\n}\n\n\n.article-slider__arrow--next {\n\tright: -65px;\n}\n\n\n.article-slider__arrow:hover {\n\tcolor: #008d55;\n}\n\n\n.article-slider__arrow:disabled {\n\topacity: 0.2;\n\n\tcursor: default;\n}\n\n\n\/**\n * Bottom button\n *\/\n\n.article-slider__button-wrap {\n\tdisplay: flex;\n\tjustify-content: center;\n\n\tmargin-top: 80px;\n}\n\n\n.article-slider__button {\n\tdisplay: inline-flex;\n\talign-items: center;\n\tjustify-content: center;\n\n\tmin-width: 185px;\n\n\tpadding: 17px 35px;\n\n\tborder-radius: 4px;\n\n\tbackground: #18a866;\n\tcolor: #fff;\n\n\tfont-size: 15px;\n\tline-height: 1;\n\tfont-weight: 600;\n\n\ttext-decoration: none;\n\n\ttransition: background-color 0.2s ease;\n}\n\n\n.article-slider__button:hover,\n.article-slider__button:focus {\n\tbackground: #078c50;\n\tcolor: #fff;\n\n\ttext-decoration: none;\n}\n\n\n\/**\n * Empty editor state\n *\/\n\n.article-slider__empty {\n\tpadding: 30px;\n\n\tbackground: #f2f2f2;\n\n\ttext-align: center;\n}\n\n\n\/**\n * Tablet - 2 articles\n *\/\n\n@media (max-width: 1000px) {\n\n\t.article-slider__slide {\n\t\tflex-basis: 50%;\n\t}\n\n\t.article-slider__arrow--prev {\n\t\tleft: -35px;\n\t}\n\n\t.article-slider__arrow--next {\n\t\tright: -35px;\n\t}\n\n}\n\n\n\/**\n * Mobile - 1 article\n *\/\n\n@media (max-width: 600px) {\n\n\t.article-slider {\n\t\tpadding-top: 25px;\n\t}\n\n\t.article-slider__heading {\n\t\tmargin-bottom: 25px;\n\n\t\tfont-size: 22px;\n\t}\n\n\t.article-slider__track {\n\t\tmargin-left: 0;\n\t\tmargin-right: 0;\n\t}\n\n\t.article-slider__slide {\n\t\tflex-basis: 100%;\n\n\t\tpadding: 0;\n\t}\n\n\t.article-slider__card {\n\t\tmin-height: 500px;\n\t}\n\n\t.article-slider__content {\n\t\tpadding: 30px;\n\t}\n\n\t.article-slider__arrow {\n\t\ttop: 40%;\n\n\t\twidth: 35px;\n\n\t\tfont-size: 44px;\n\n\t\tbackground: rgba(255,255,255,0.85);\n\t}\n\n\t.article-slider__arrow--prev {\n\t\tleft: 5px;\n\t}\n\n\t.article-slider__arrow--next {\n\t\tright: 5px;\n\t}\n\n\t.article-slider__button-wrap {\n\t\tmargin-top: 40px;\n\t}\n\n}<\/style>\n<section\n\tid=\"article-slider-block_5eb11154ffd7173a64b735b1345f18f4\"\n\tclass=\"article-slider\"\n>\n\n\t\n\t\t<h2 class=\"article-slider__heading\">\n\t\t\tArtikel\t\t<\/h2>\n\n\t\n\n\t\n\t\t<div class=\"article-slider__carousel\">\n\n\t\t\t\n\n\t\t\t<div class=\"article-slider__viewport\">\n\n\t\t\t\t<div class=\"article-slider__track\">\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"article-slider__slide\">\n\n\t\t\t\t\t\t\t<div class=\"article-slider__card\">\n\n\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\tclass=\"article-slider__image\"\n\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/microscopy-and-precision-positioning-glossary\/\"\n\t\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/08\/OpenStand_704x540.jpg\" class=\"attachment-large size-large wp-post-image\" alt=\"Close up of a motorized xy stage on an OpenStand-V inverted imaging platform. imaging platform\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/08\/OpenStand_704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/08\/OpenStand_704x540-300x230.jpg 300w\" sizes=\"auto, (max-width: 704px) 100vw, 704px\" \/>\n\t\t\t\t\t\t\t\t<\/a>\n\n\n\t\t\t\t\t\t\t\t<div class=\"article-slider__content\">\n\n\t\t\t\t\t\t\t\t\t<div class=\"article-slider__date\">\n\t\t\t\t\t\t\t\t\t\t27\/07\/2026\t\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t\t<h3 class=\"article-slider__title\">\n\n\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.prior.com\/de\/blog\/microscopy-and-precision-positioning-glossary\/\">\n\t\t\t\t\t\t\t\t\t\t\tMicroscopy and Precision Positioning Glossary: Terms, Definitions and Industry Guide\t\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t\t<\/h3>\n\n\n\t\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\t\tclass=\"article-slider__cta\"\n\t\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/microscopy-and-precision-positioning-glossary\/\"\n\t\t\t\t\t\t\t\t\t>\n\t\t\t\t\t\t\t\t\t\t<span aria-hidden=\"true\">\u2198<\/span>\n\t\t\t\t\t\t\t\t\t\tView Article\n\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"article-slider__slide\">\n\n\t\t\t\t\t\t\t<div class=\"article-slider__card\">\n\n\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\tclass=\"article-slider__image\"\n\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/h100a-compact-motorized-xy-microscope-stage-for-precision-microscopy\/\"\n\t\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/H100Arenderwebversion_704x540.jpg\" class=\"attachment-large size-large wp-post-image\" alt=\"H100A compact precision motorized XY stage for upright microscopes\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/H100Arenderwebversion_704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/H100Arenderwebversion_704x540-300x230.jpg 300w\" sizes=\"auto, (max-width: 704px) 100vw, 704px\" \/>\n\t\t\t\t\t\t\t\t<\/a>\n\n\n\t\t\t\t\t\t\t\t<div class=\"article-slider__content\">\n\n\t\t\t\t\t\t\t\t\t<div class=\"article-slider__date\">\n\t\t\t\t\t\t\t\t\t\t16\/06\/2026\t\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t\t<h3 class=\"article-slider__title\">\n\n\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.prior.com\/de\/blog\/h100a-compact-motorized-xy-microscope-stage-for-precision-microscopy\/\">\n\t\t\t\t\t\t\t\t\t\t\tProScan H100A \u2013 kompakter, motorisierter XY-Mikroskop-Tisch f\u00fcr die Pr\u00e4zisionsmikroskopie: Fragen und Antworten mit dem Produktmanager\t\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t\t<\/h3>\n\n\n\t\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\t\tclass=\"article-slider__cta\"\n\t\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/h100a-compact-motorized-xy-microscope-stage-for-precision-microscopy\/\"\n\t\t\t\t\t\t\t\t\t>\n\t\t\t\t\t\t\t\t\t\t<span aria-hidden=\"true\">\u2198<\/span>\n\t\t\t\t\t\t\t\t\t\tView Article\n\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"article-slider__slide\">\n\n\t\t\t\t\t\t\t<div class=\"article-slider__card\">\n\n\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\tclass=\"article-slider__image\"\n\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/how-a-motorized-filter-cube-turret-expands-microscope-performance-across-advanced-imaging-workflows\/\"\n\t\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108FC-filter-cube-turret-PR704x540.jpg\" class=\"attachment-large size-large wp-post-image\" alt=\"Three quarters view of the Prior motorized filter cube turret for multi-colour fluorescence imaging.\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108FC-filter-cube-turret-PR704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108FC-filter-cube-turret-PR704x540-300x230.jpg 300w\" sizes=\"auto, (max-width: 704px) 100vw, 704px\" \/>\n\t\t\t\t\t\t\t\t<\/a>\n\n\n\t\t\t\t\t\t\t\t<div class=\"article-slider__content\">\n\n\t\t\t\t\t\t\t\t\t<div class=\"article-slider__date\">\n\t\t\t\t\t\t\t\t\t\t13\/05\/2026\t\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t\t<h3 class=\"article-slider__title\">\n\n\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.prior.com\/de\/blog\/how-a-motorized-filter-cube-turret-expands-microscope-performance-across-advanced-imaging-workflows\/\">\n\t\t\t\t\t\t\t\t\t\t\tWie ein motorisierter Filterw\u00fcrfel-Revolver die Mikroskopleistung in fortschrittlichen Imaging-Workflows erweitert\t\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t\t<\/h3>\n\n\n\t\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\t\tclass=\"article-slider__cta\"\n\t\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/how-a-motorized-filter-cube-turret-expands-microscope-performance-across-advanced-imaging-workflows\/\"\n\t\t\t\t\t\t\t\t\t>\n\t\t\t\t\t\t\t\t\t\t<span aria-hidden=\"true\">\u2198<\/span>\n\t\t\t\t\t\t\t\t\t\tView Article\n\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t<article class=\"article-slider__slide\">\n\n\t\t\t\t\t\t\t<div class=\"article-slider__card\">\n\n\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\tclass=\"article-slider__image\"\n\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/high-speed-fluorescence-imaging-for-automated-microscopy-systems\/\"\n\t\t\t\t\t\t\t\t>\n\n\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108B-filter-wheel-704x540-1.jpg\" class=\"attachment-large size-large wp-post-image\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108B-filter-wheel-704x540-1.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/HF108B-filter-wheel-704x540-1-300x230.jpg 300w\" sizes=\"auto, (max-width: 704px) 100vw, 704px\" \/>\n\t\t\t\t\t\t\t\t<\/a>\n\n\n\t\t\t\t\t\t\t\t<div class=\"article-slider__content\">\n\n\t\t\t\t\t\t\t\t\t<div class=\"article-slider__date\">\n\t\t\t\t\t\t\t\t\t\t21\/04\/2026\t\t\t\t\t\t\t\t\t<\/div>\n\n\n\t\t\t\t\t\t\t\t\t<h3 class=\"article-slider__title\">\n\n\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.prior.com\/de\/blog\/high-speed-fluorescence-imaging-for-automated-microscopy-systems\/\">\n\t\t\t\t\t\t\t\t\t\t\tHF108B Filterrad: Hochgeschwindigkeits-Fluoreszenz-Imaging f\u00fcr automatisierte Mikroskopiesysteme\t\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t\t<\/h3>\n\n\n\t\t\t\t\t\t\t\t\t<a\n\t\t\t\t\t\t\t\t\t\tclass=\"article-slider__cta\"\n\t\t\t\t\t\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/high-speed-fluorescence-imaging-for-automated-microscopy-systems\/\"\n\t\t\t\t\t\t\t\t\t>\n\t\t\t\t\t\t\t\t\t\t<span aria-hidden=\"true\">\u2198<\/span>\n\t\t\t\t\t\t\t\t\t\tView Article\n\t\t\t\t\t\t\t\t\t<\/a>\n\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t<\/article>\n\n\t\t\t\t\t\n\t\t\t\t<\/div>\n\n\t\t\t<\/div>\n\n\n\t\t\t\n\t\t<\/div>\n\n\n\t\t\n\t\t\t<div class=\"article-slider__button-wrap\">\n\n\t\t\t\t<a\n\t\t\t\t\tclass=\"article-slider__button\"\n\t\t\t\t\thref=\"https:\/\/www.prior.com\/de\/blog\/\"\n\t\t\t\t\ttarget=\"_self\"\n\t\t\t\t\t\t\t\t\t>\n\t\t\t\t\tView Articles\n\t\t\t\t<\/a>\n\n\t\t\t<\/div>\n\n\t\t\n\n\t\n<\/section><\/div><\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Automatisierte Bildgebung f\u00fcr die Halbleiterinspektion Steigerung des Durchsatzes und Sicherung der Qualit&#228;t durch schnelle, hochpr&#228;zise Positionierung und Autofokus Die Pr&uuml;fung von Halbleitern erfordert extreme Pr&auml;zision und Zuverl&auml;ssigkeit, denn schon kleinste Fehler k&ouml;nnen die Leistung des Chips beeintr&auml;chtigen. Da die Merkmale der Wafer im Nanometerbereich gemessen werden, m&uuml;ssen die Pr&uuml;fsysteme eine Genauigkeit im Submikrometerbereich, eine konstante [&hellip;]<\/p>\n","protected":false},"featured_media":4551,"template":"","meta":{"_acf_changed":false,"_genesis_hide_title":false,"_genesis_hide_breadcrumbs":false,"_genesis_hide_singular_image":false,"_genesis_hide_footer_widgets":false,"_genesis_custom_body_class":"","_genesis_custom_post_class":"","_genesis_layout":"","footnotes":""},"class_list":["post-3736","application","type-application","status-publish","has-post-thumbnail","entry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.6 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Automatisierte Halbleiterinspektion | Automatisierte Mikroskope<\/title>\n<meta name=\"description\" content=\"Erh\u00f6he die Genauigkeit und Geschwindigkeit der Waferinspektion mit automatisierter Mikroskopie, Nanopositioniertischen und Laser-Autofokus-Systemen\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Automatisierte Halbleiterinspektion | Automatisierte Mikroskope\" \/>\n<meta property=\"og:description\" content=\"Erh\u00f6he die Genauigkeit und Geschwindigkeit der Waferinspektion mit automatisierter Mikroskopie, Nanopositioniertischen und Laser-Autofokus-Systemen\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/\" \/>\n<meta property=\"og:site_name\" content=\"Prior Scientific\" \/>\n<meta property=\"article:modified_time\" content=\"2026-09-12T11:20:26+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"704\" \/>\n\t<meta property=\"og:image:height\" content=\"540\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Gesch\u00e4tzte Lesezeit\" \/>\n\t<meta name=\"twitter:data1\" content=\"4\u00a0Minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/\",\"url\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/\",\"name\":\"Automatisierte Halbleiterinspektion | Automatisierte Mikroskope\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.prior.com\\\/wp-content\\\/uploads\\\/2026\\\/09\\\/silicon-wafer-with-semiconductors-blog_704x540.jpg\",\"datePublished\":\"2026-08-15T11:57:00+00:00\",\"dateModified\":\"2026-09-12T11:20:26+00:00\",\"description\":\"Erh\u00f6he die Genauigkeit und Geschwindigkeit der Waferinspektion mit automatisierter Mikroskopie, Nanopositioniertischen und Laser-Autofokus-Systemen\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/#breadcrumb\"},\"inLanguage\":\"de\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"de\",\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.prior.com\\\/wp-content\\\/uploads\\\/2026\\\/09\\\/silicon-wafer-with-semiconductors-blog_704x540.jpg\",\"contentUrl\":\"https:\\\/\\\/www.prior.com\\\/wp-content\\\/uploads\\\/2026\\\/09\\\/silicon-wafer-with-semiconductors-blog_704x540.jpg\",\"width\":704,\"height\":540,\"caption\":\"Colourful image of etched silicon wafers reflecting patterns of light.\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/automated-microscopy-semiconductor-inspection\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/www.prior.com\\\/de\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Applications\",\"item\":\"https:\\\/\\\/www.prior.com\\\/de\\\/applications\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Automatisierte Bildgebung f\u00fcr die Halbleiterinspektion\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/#website\",\"url\":\"https:\\\/\\\/www.prior.com\\\/de\\\/\",\"name\":\"Prior\",\"description\":\"Experts in Precision Positioning and Microscope Automation\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.prior.com\\\/de\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/#organization\",\"name\":\"Prior\",\"url\":\"https:\\\/\\\/www.prior.com\\\/de\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"de\",\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.prior.com\\\/wp-content\\\/uploads\\\/2026\\\/08\\\/prior_logo.png\",\"contentUrl\":\"https:\\\/\\\/www.prior.com\\\/wp-content\\\/uploads\\\/2026\\\/08\\\/prior_logo.png\",\"width\":187,\"height\":90,\"caption\":\"Prior\"},\"image\":{\"@id\":\"https:\\\/\\\/www.prior.com\\\/de\\\/#\\\/schema\\\/logo\\\/image\\\/\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Automatisierte Halbleiterinspektion | Automatisierte Mikroskope","description":"Erh\u00f6he die Genauigkeit und Geschwindigkeit der Waferinspektion mit automatisierter Mikroskopie, Nanopositioniertischen und Laser-Autofokus-Systemen","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/","og_locale":"de_DE","og_type":"article","og_title":"Automatisierte Halbleiterinspektion | Automatisierte Mikroskope","og_description":"Erh\u00f6he die Genauigkeit und Geschwindigkeit der Waferinspektion mit automatisierter Mikroskopie, Nanopositioniertischen und Laser-Autofokus-Systemen","og_url":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/","og_site_name":"Prior Scientific","article_modified_time":"2026-09-12T11:20:26+00:00","og_image":[{"width":704,"height":540,"url":"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"Gesch\u00e4tzte Lesezeit":"4\u00a0Minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/","url":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/","name":"Automatisierte Halbleiterinspektion | Automatisierte Mikroskope","isPartOf":{"@id":"https:\/\/www.prior.com\/de\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/#primaryimage"},"image":{"@id":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/#primaryimage"},"thumbnailUrl":"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg","datePublished":"2026-08-15T11:57:00+00:00","dateModified":"2026-09-12T11:20:26+00:00","description":"Erh\u00f6he die Genauigkeit und Geschwindigkeit der Waferinspektion mit automatisierter Mikroskopie, Nanopositioniertischen und Laser-Autofokus-Systemen","breadcrumb":{"@id":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/#breadcrumb"},"inLanguage":"de","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/"]}]},{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/#primaryimage","url":"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg","contentUrl":"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/silicon-wafer-with-semiconductors-blog_704x540.jpg","width":704,"height":540,"caption":"Colourful image of etched silicon wafers reflecting patterns of light."},{"@type":"BreadcrumbList","@id":"https:\/\/www.prior.com\/de\/applications\/automated-microscopy-semiconductor-inspection\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.prior.com\/de\/"},{"@type":"ListItem","position":2,"name":"Applications","item":"https:\/\/www.prior.com\/de\/applications\/"},{"@type":"ListItem","position":3,"name":"Automatisierte Bildgebung f\u00fcr die Halbleiterinspektion"}]},{"@type":"WebSite","@id":"https:\/\/www.prior.com\/de\/#website","url":"https:\/\/www.prior.com\/de\/","name":"Prior","description":"Experts in Precision Positioning and Microscope Automation","publisher":{"@id":"https:\/\/www.prior.com\/de\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.prior.com\/de\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de"},{"@type":"Organization","@id":"https:\/\/www.prior.com\/de\/#organization","name":"Prior","url":"https:\/\/www.prior.com\/de\/","logo":{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.prior.com\/de\/#\/schema\/logo\/image\/","url":"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/08\/prior_logo.png","contentUrl":"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/08\/prior_logo.png","width":187,"height":90,"caption":"Prior"},"image":{"@id":"https:\/\/www.prior.com\/de\/#\/schema\/logo\/image\/"}}]}},"publishpress_future_workflow_manual_trigger":{"enabledWorkflows":[]},"_links":{"self":[{"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/application\/3736","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/application"}],"about":[{"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/types\/application"}],"version-history":[{"count":8,"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/application\/3736\/revisions"}],"predecessor-version":[{"id":9541,"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/application\/3736\/revisions\/9541"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/media\/4551"}],"wp:attachment":[{"href":"https:\/\/www.prior.com\/de\/wp-json\/wp\/v2\/media?parent=3736"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}