Industrial Inspection With Olympus/Evident MX Industrial Microscopes (154 mm x 154 mm)
The ProScan HE05/2OL encoded motorized XY stage is designed for Evident/Olympus industrial microscopes. See the product compatibility tab for details.
With 154 x 154 mm XY travel, it is optimized for scanning 6-inch semiconductor wafers. The slim design enables use in transmitted light applications.
The HE05/2OL features linear encoders and Prior's patented Intelligent Scanning Technology (IST) to enhance repeatability, accuracy, and linearity together with a 2 mm ballscrew for speed. It scans industrial samples reliably and efficiently, with several dedicated sample holders available.
The HE05/2OL is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).
