H116 heavy load 8-inch travel motorized XY stage for upright industrial microscopes.

ProScan H116/2 Large Format Motorized XY Stage

Heavy Load 8-inch Travel Range for Upright Industrial Microscopes (255 mm x 215 mm)

The ProScan H116/2 motorized XY stage for upright industrial microscopy is compatible with Prior's OpenStand-L platform and is fully customizable.

It has a long travel range and 25 kg load capacity for scanning large heavy samples such as 8-inch semiconductor wafers, flat panel displays and printed circuit boards up to 200 mm diameter.

The H116/2 features Prior's patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans large industrial samples reliably and efficiently.

Other drive configurations for increased speed may be available depending on your region.

It is compatible with transmitted light applications and provides easy access for loading samples.

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Data Sheet

Easy to integrate into customized imaging solutions
Supports 8-inch wafers, with extra X-axis travel range for easy sample loading
Slim design with 25 kg load capacity
Excellent combination of speed and accuracy
Intelligent Scanning Technology™ (US Patent 7,330,307)

Travel range	255 mm x 215 mm
Unidirectional repeatability	< 0.6 µm
Bidirectional repeatability	< 3.0 µm
Metric accuracy	0.14 µm/mm
Full travel metric accuracy	< 30.9 µm
Resolution	0.04 µm
Squareness	< 45 arcsec
Maximum velocity	60 mm/s
Maximum load	25 kg
Encoders	No
Motor type	200 step
Screw pitch	2 mm
Weight	8 kg