{"id":5989,"date":"2021-04-07T12:00:00","date_gmt":"2021-04-07T12:00:00","guid":{"rendered":"https:\/\/gk5l0g06kd.onrocket.site\/?post_type=blog&#038;p=5989"},"modified":"2026-09-11T19:37:01","modified_gmt":"2026-09-11T19:37:01","slug":"fast-afm-scanning-realizing-the-gains-of-closed-loop-velocity-control","status":"publish","type":"blog","link":"https:\/\/www.prior.com\/cn\/blog\/fast-afm-scanning-realizing-the-gains-of-closed-loop-velocity-control\/","title":{"rendered":"\u539f\u5b50\u529b\u663e\u5fae\u955c\u7684\u5feb\u901f\u626b\u63cf\uff1a\u5b9e\u73b0\u95ed\u73af\u901f\u5ea6\u63a7\u5236\u7684\u589e\u76ca"},"content":{"rendered":"<div class=\"yoast-breadcrumbs\"><span><span><a href=\"https:\/\/www.prior.com\/cn\/\">Home<\/a><\/span> \u00bb <span><a href=\"https:\/\/www.prior.com\/cn\/blog\/\">\u5e94\u7528\u7eaa\u8981<\/a><\/span> \u00bb <span class=\"breadcrumb_last\" aria-current=\"page\">\u539f\u5b50\u529b\u663e\u5fae\u955c\u7684\u5feb\u901f\u626b\u63cf\uff1a\u5b9e\u73b0\u95ed\u73af\u901f\u5ea6\u63a7\u5236\u7684\u589e\u76ca<\/span><\/span><\/div>\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n\n<h1 class=\"wp-block-heading\">\u539f\u5b50\u529b\u663e\u5fae\u955c\u7684\u5feb\u901f\u626b\u63cf\uff1a\u5b9e\u73b0\u95ed\u73af\u901f\u5ea6\u63a7\u5236\u7684\u589e\u76ca<\/h1>\n\n\n\n<p class=\"wp-block-post-date wp-block-paragraph\">07.04.21<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u6587\u7ae0\u6700\u521d\u4e8e2021\u5e744\u67087\u65e5\u53d1\u8868\u5728&nbsp;<a href=\"https:\/\/physicsworld.com\/a\/fast-afm-scanning-realizing-the-gains-of-closed-loop-velocity-control\/\" target=\"_blank\">physicsworld.com&nbsp;<\/a>\u7f51\u7ad9\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u7eb3\u7c73\u5b9a\u4f4d\u4e13\u5bb6Queensgate \u6b63\u4e3a\u9ad8\u901f\u3001\u9ad8\u7cbe\u5ea6\u539f\u5b50\u529b\u663e\u5fae\u955c (AFM) \u7cfb\u7edf\u7684\u5e94\u7528\u505a\u6280\u672f\u652f\u6301\u7684\u51c6\u5907\u3002<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u82f1\u56fd\u9ad8\u7cbe\u5ea6\u7eb3\u7c73\u5b9a\u4f4d\u4ea7\u54c1\u5236\u9020\u5546<a href=\"https:\/\/www.nanopositioning.com\/\" target=\"_blank\">Queensgate<\/a>&nbsp;\u4e0e\u82f1\u56fd\u56fd\u5bb6\u8ba1\u91cf\u7814\u7a76\u6240\u56fd\u5bb6\u7269\u7406\u5b9e\u9a8c\u5ba4 (<a href=\"https:\/\/www.npl.co.uk\/\">NPL<\/a>) \u7684\u79d1\u7814\u56e2\u961f\u5408\u4f5c\u7814\u53d1\u6240\u53d6\u5f97\u7684\u5b9e\u9a8c\u6210\u679c\uff0c\u6709\u671b\u83b7\u5f97\u4e0b\u4e00\u4ee3\u539f\u5b50\u529b\u663e\u5fae\u955c (AFM) \u548c\u5176\u4ed6\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c (SPM) \u7cfb\u7edf\u5236\u9020\u5546\u7684\u5173\u6ce8\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u4eca\u5e74\u65e9\u4e9b\u65f6\u5019\u5b8c\u6210\u7684\u4e00\u9879\u6982\u5ff5\u9a8c\u8bc1\u7814\u7a76\u4e2d\uff0cNPL\u7814\u7a76\u4eba\u5458\u5bf9Queensgate\u4ea7\u54c1\u7684\u4f7f\u80fd\u6280\u672f\u8fdb\u884c\u4e86\u6d4b\u8bd5&mdash;&mdash;\u5305\u62ec\u9ad8\u901f\u3001\u538b\u7535\u9a71\u52a8\u7684\u7eb3\u7c73\u5b9a\u4f4d\u5e73\u53f0\u548c\u4e13\u6709\u7684\u95ed\u73af\u901f\u5ea6\u63a7\u5236\u7b97\u6cd5\uff0c\u7531\u6b64\u6765\u8bc4\u4f30Queensgate\u4ea7\u54c1\u5728\u9ad8\u901fAFM\u626b\u63cf\u5e94\u7528\u65b9\u9762\u7684\u6f5c\u5728\u9002\u7528\u6027\u3002\u5b9e\u9a8c\u7ed3\u679c\u5f15\u4eba\u6ce8\u76ee\uff1a\u4ee50.5 mm\/s\u52304 mm\/s\u7684\u5149\u6805\u626b\u63cf\u901f\u5ea6\uff0c\u5728\u51e0\u5206\u949f\u5185\u5c31\u53ef\u4ee5\u83b7\u5f97\u5927\u9762\u79ef\u3001\u9ad8\u8d28\u91cf\u7684\u7eb3\u7c73\u7a7a\u95f4\u5206\u8fa8\u7387AFM\u56fe\u50cf\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5c3d\u7ba1NPL\u548cQueensgate\u4e4b\u524d\u66fe\u591a\u6b21\u5408\u4f5c\uff0c\u4f46\u6700\u8fd1\u7684\u4e00\u9879\u5de5\u4f5c\u662f\u901a\u8fc7\u6d4b\u91cf\u6062\u590d (<a href=\"https:\/\/www.npl.co.uk\/measurement-for-recovery\" target=\"_blank\">M4R<\/a>) \u8ba1\u5212\u8fdb\u884c\u7684\u3002\u8fd9\u9879\u7531\u82f1\u56fd\u653f\u5e9c\u8d44\u52a9\u4e14\u7531NPL\u4e3b\u5bfc\u7684\u8ba1\u5212\uff0c\u65e8\u5728\u652f\u6301\u5de5\u4e1a\u7ecf\u6d4e\u4eceCOVID-19 \u6240\u9020\u6210\u7684\u5f71\u54cd\u4e2d\u590d\u82cf\u3002&ldquo;M4R\u63d0\u4f9b\u83b7\u53d6\u9ad8\u7aef\u7814\u53d1\u3001\u4e13\u4e1a\u77e5\u8bc6\u548c\u8bbe\u65bd\u7684\u9014\u5f84\uff0c\u4ee5\u5e2e\u52a9\u89e3\u51b3\u79d1\u6280\u548c\u6280\u672f\u65e0\u6cd5\u7834\u89e3\u7684\u5206\u6790\u6216\u6d4b\u91cf\u7684\u95ee\u9898\uff0c&rdquo;NPL\u5c3a\u5bf8\u8ba1\u91cf\u7814\u7a76\u79d1\u5b66\u5bb6Edward 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src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/AFM-data-300x239-1.jpeg\" style=\"height:239px; width:300px\" \/><\/p>\n\n\n\n<h4 class=\"wp-block-heading\">\u83b7\u53d6\u56fe\u7247\uff1aNPL\u7814\u7a76\u6d89\u53ca\u5230\u4e00\u7cfb\u5217\u6807\u51c6\u5316\u6d4b\u8bd5\u6837\u672c\u7684\u9ad8\u901fAFM\u626b\u63cf\u3002\u4e0a\u8ff0\u793a\u4f8b\u4e2d\u7684\u7f51\u683c\u8bbe\u7f6e\u4e3a\u6052\u5b9a\u7684300nm\u95f4\u8ddd\u3002\uff08\u63d0\u4f9b\uff1aNPL\uff09<\/h4>\n\n\n\n<p 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class=\"wp-block-paragraph\">\u5bf9\u4e8eQueensgate\u7684\u5de5\u7a0b\u56e2\u961f\u6765\u8bf4\uff0c\u4e0eNPL\u5408\u4f5c\u4e5f\u4e3a\u95ed\u73af\u901f\u5ea6\u63a7\u5236\u6280\u672f\u7ec4\u5408\u7684\u9053\u8def\u6d4b\u8bd5\u63d0\u4f9b\u4e86\u673a\u4f1a\uff0c\u4ed6\u4eec\u8ba4\u4e3a\uff0c\u5728\u4f20\u7edf\u610f\u4e49\u4e0a\uff0c\u8fd9\u5c06\u89e3\u51b3\u4e0e\u9ad8\u901fAFM\u626b\u63cf\u76f8\u5173\u7684\u7cfb\u7edf\u7ea7\u95ee\u9898\u3002Queensgate\u7684\u9996\u5e2d\u8f6f\u4ef6\u5de5\u7a0b\u5e08Graham 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class=\"wp-block-paragraph\">\u8fdb\u4e00\u6b65\u6765\u8bf4\uff0c\u5728\u5bf9\u901f\u5ea6\u8fdb\u884c\u7cbe\u786e\u63a7\u5236\u4e4b\u524d\uff0c\u4e5f\u53ef\u4ee5\u901a\u8fc7\u89c2\u5bdf\u56fe\u50cf\u8d28\u91cf\u6765\u5224\u65adAFM\u5e73\u53f0\u8fd0\u884c\u7684\u5feb\u6162\u3002&ldquo;\u5982\u679c\u6bcf\u9694\u51e0\u5fae\u79d2\u8fdb\u884c\u4e00\u6b21AFM\u6d4b\u91cf\u5e76\u4ee5\u6052\u5b9a\u901f\u5ea6\u8fd0\u884c\uff0c\u5219\u53ef\u83b7\u5f97\u6052\u5b9a\u95f4\u8ddd\u548c\u6e05\u6670\u56fe\u50cf\u7684\u6d4b\u91cf\u7ed3\u679c\uff0c&rdquo;Bartlett \u8865\u5145\u9053\u3002 &ldquo;\u5982\u679cAFM\u63a2\u5934\u901f\u5ea6\u4e0d\u4e00\u81f4\uff0c\u5219\u6d4b\u91cf\u7ed3\u679c\u5c06\u65e0\u6cd5\u5747\u5300\u5206\u5e03\uff0c\u6700\u7ec8\u4f1a\u5bfc\u81f4\u6b6a\u659c\u6216\u626d\u66f2\u7684\u56fe\u50cf\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u6ca1\u6709\u63a7\u5236\u5c31\u6ca1\u6709\u901f\u5ea6<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u5b9e\u9a8c\u7814\u7a76\u4e4b\u524d\uff0cHeaps\u4f7f\u7528Queensgate \u7684\u786c\u4ef6\u6539\u9020NPL\u5b9a\u5236\u7684\u8ba1\u91cf\u9ad8\u901fAFM\uff08\u7531\u82f1\u56fd\u5e03\u91cc\u65af\u6258\u5c14\u5927\u5b66\u5171\u540c\u5f00\u53d1\u7684\u4eea\u5668\uff09\u3002\u5c31\u7ec6\u8282\u800c\u8a00\uff0c\u8fd9\u610f\u5473\u7740\u7528\u7531<a href=\"https:\/\/www.nanopositioning.com\/product-category\/nanopositioning\/nanopositioning-control-electronics-and-software\" target=\"_blank\">Queensgate NanoScan NPC-D-6330<\/a>&nbsp;\u63a7\u5236\u5668\uff08\u63d0\u4f9b\u95ed\u73af\u63a7\u5236\uff09\u9a71\u52a8\u7684<a href=\"https:\/\/www.nanopositioning.com\/product-category\/nanopositioning\/nanopositioning-stages\" target=\"_blank\">Queensgate NPS-XY-100<\/a>&nbsp;\u5e73\u53f0\uff08100&times;100 &mu;m \u8303\u56f4\uff09\u66ff\u6362AFM\u73b0\u6709\u76845&times;5 &mu;m XY\u8f74\u7684\u5e73\u53f0\u6765\u63a7\u5236\u4f4d\u7f6e\u548c\u901f\u5ea6\u3002\u968f\u540e\uff0c\u7814\u7a76\u4eba\u5458\u5bf9\u51e0\u4e2a\u5750\u6807\u4e5f\u8fdb\u884c\u4e86\u8bc4\u4f30\uff0c\u521d\u6b65\u6d4b\u8bd5\u8868\u660e\uff0c\u5728\u9ad8\u8fbe4 mm\/s\u7684\u5149\u6805\u901f\u7387\u4e0b\uff0c\u5176\u901f\u5ea6\u63a7\u5236\u4ecd\u7136\u975e\u5e38\u7cbe\u786e&mdash;&mdash;\u5c3d\u7ba1\u5149\u6805\u8f74\u4e0a\u5206\u8fa8\u7387\u9010\u6e10\u964d\u4f4e\uff0c\u4f46\u626b\u63cf\u901f\u5ea6\u5374\u4ece0.5 mm\/s\u9010\u6b65\u589e\u52a0\u52304 mm\/s\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">. <img decoding=\"async\" alt=\"\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/Image-of-numbers-300x250-1.jpg\" style=\"height:250px; width:300px\" \/><\/p>\n\n\n\n<h4 class=\"wp-block-heading\">\u5de5\u4f5c\u6548\u7387\uff1a\u626b\u63cf\u66f4\u5927\u533a\u57df\uff0c\u8fd9\u5f2080&times;80 &mu;m AFM\u56fe\u50cf\u662f\u572840\u79d2\u5185\u4ee52 mm\/s\u7684\u626b\u63cf\u901f\u5ea6\u5b8c\u6210\u7684\u3002\u8bf7\u6ce8\u610f\uff0c\u8be5\u6837\u54c1\u663e\u793a\u4e86\u65e9\u671f\u4f7f\u7528\u4e2d\u7684\u53ef\u89c1\u5212\u75d5\u3002(\u63d0\u4f9b\uff1aNPL)<\/h4>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e0e\u5feb\u901fAFM\u626b\u63cf\u76f8\u5173\u7684\u95ee\u9898\u662f\u5149\u6805\u7ebf\u6bcf\u4e00\u7aef\u7684\u5feb\u901f\u52a0\u901f\u548c\u51cf\u901f\u6fc0\u53d1\u673a\u68b0\u5171\u632f\u7684\u7a0b\u5ea6\u3002\u8fd9\u79cd\u73b0\u8c61\uff0c\u901a\u5e38\u88ab\u79f0\u4e3a&ldquo;\u632f\u94c3&rdquo;\uff0c\u5f53\u626b\u63cf\u901f\u5ea6\u8f83\u5feb\u65f6\uff0c\u8be5\u73b0\u8c61\u5219\u66f4\u660e\u663e\u3002&mdash;&mdash;\u8fd9\u53cd\u8fc7\u6765\u53c8\u4e3a\u56fe\u50cf\u91c7\u96c6\u63d0\u4f9b\u4e86\u66f4\u5c0f\u7684\u7ebf\u6027\u533a\u57df\u3002 \u7136\u800c\uff0c\u901a\u8fc7\u95ed\u73af\u63a7\u5236\u548c\u9677\u6ce2\u6ee4\u6ce2\u7b49\u529f\u80fd\uff0cNanoScan\u63a7\u5236\u5668\u53ef\u4ee5\u5927\u5927\u51cf\u5c11\u5f00\u73af\u63a7\u5236\u7cfb\u7edf\u7684\u8fd9\u4e9b\u5f71\u54cd\u3002\u8be5\u63a7\u5236\u5668\u8fd8\u5177\u6709\u5185\u7f6e\u6ce2\u5f62\u751f\u6210\u529f\u80fd\uff0c\u5176\u4e2d\u5305\u62ecS\u66f2\u7ebf\u52a0\u51cf\u901f\u66f2\u7ebf\uff0c\u4ee5\u8fdb\u4e00\u6b65\u51cf\u5c11\u6b64\u7c7b\u5171\u632f\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4f5c\u4e3aNPL\u9879\u76ee\u7684\u4e00\u90e8\u5206\uff0c\u56fe\u50cf\u91c7\u96c6\u7684\u7ec6\u8282\u4e5f\u9700\u8981\u5ba1\u67e5\u3002\u9ad8\u901f\u53ca\u5927\u9762\u79ef\u626b\u63cf\u7684\u7ed3\u5408\u5927\u5927\u7b80\u5316\u4e86\u6210\u50cf\u8fc7\u7a0b\u3002\u539f\u59cb\u76845&times;5 &mu;m\u538b\u7535\u5e73\u53f0\uff0c\u4f7f\u7528\u7684\u662fNPL\u9ad8\u901fAFM\u8fdb\u884c\u5927\u9762\u79ef\u6210\u50cf\uff0c\u8be5\u8bbe\u5907\u9700\u501f\u52a9\u5b9a\u4f4d\u5668\u6765\u79fb\u52a8\u7eb3\u7c73\u5b9a\u4f4d\u5e73\u53f0\uff0c\u4ee5\u6b64\u83b7\u53d6\u4e00\u7cfb\u5217\u8f83\u5c0f\u7684\u56fe\u50cf&ldquo;\u788e\u7247&rdquo;\uff0c\u968f\u540e\u5c06\u5176\u62fc\u63a5\u8d77\u6765&mdash;&mdash;\u8fc7\u7a0b\u7f13\u6162\u800c\u7e41\u7410\uff0c\u5ef6\u957f\u56fe\u50cf\u91c7\u96c6\u65f6\u95f4\u3002\u76f8\u6bd4\u4e4b\u4e0b\uff0cNPL\u7684\u7ed3\u679c\u8868\u660e\uff0c\u5355\u72ec\u4f7f\u7528100&times;100 &mu;m\u538b\u7535\u5e73\u53f0\u53ef\u83b7\u53d6\u66f4\u591a\u56fe\u50cf\uff0c\u800c\u91c7\u7528\u901f\u5ea6\u63a7\u5236\u7684\u9ad8\u901f\u626b\u63cf\u53ef\u5927\u5e45\u5ea6\u7f29\u77ed\u56fe\u50cf\u91c7\u96c6\u65f6\u95f4\u3002\u5373\u4f7f\u626b\u63cf\u66f4\u5927\u533a\u57df\uff0c\u5b9a\u4f4d\u5668\u7684\u79fb\u52a8\u4e5f\u4f1a\u660e\u663e\u51cf\u5c11&mdash;&mdash;NPS-XY-100\u5e73\u53f0\u7684\u53c8\u4e00\u7a81\u7834\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u7ee7M4R\u5408\u4f5c\u4e4b\u540e\uff0cQueensgate\u53ca\u5176\u6bcd\u516c\u53f8Prior Scientific\u5e0c\u671b\u76f4\u63a5\u4e0eSPM\u53ca\u5176\u4ed6\u5730\u533a\u7684OEM\u5408\u4f5c\u4f19\u4f34\u5206\u4eab\u5b9e\u9a8c\u7ed3\u679c\u3002Bartlett\u603b\u7ed3\u9053\uff1a&ldquo;\u6211\u4eec\u770b\u5230\u4e86\u7eb3\u7c73\u5b9a\u4f4d\u5e73\u53f0\u3001\u63a7\u5236\u7535\u5b50\u8bbe\u5907\u548c\u7b97\u6cd5\u7684\u771f\u6b63\u6f5c\u529b\uff0c\u53ef\u663e\u8457\u63d0\u9ad8AFM\u7684\u901f\u5ea6\u3001\u541e\u5410\u91cf\u548c\u56fe\u50cf\u8d28\u91cf\u3002&rdquo;&ldquo;\u8fd8\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u540c\u6837\u7684\u6838\u5fc3\u6784\u5efa\u5757\u4e5f\u975e\u5e38\u9002\u5408\u5176\u4ed6\u5148\u8fdb\u5e94\u7528\uff0c\u4f8b\u5982\u4f7f\u7528\u5171\u805a\u7126\u663e\u5fae\u955c\u76843D\u6d3b\u7ec6\u80de\u6210\u50cf\u3002&rdquo;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u6587\u7ae0\u6700\u521d\u4e8e2021\u5e744\u67087\u65e5\u53d1\u8868\u5728<a href=\"https:\/\/physicsworld.com\/a\/fast-afm-scanning-realizing-the-gains-of-closed-loop-velocity-control\/\" target=\"_blank\">physicsworld.com<\/a>\u7f51\u7ad9\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">&nbsp;<\/p>\n\n<\/div>\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"704\" height=\"540\" src=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/Queensgatestage704x540.jpg\" alt=\"An operator places a Queensgate piezo nanopositioning stage on a glass plate.\" class=\"wp-image-8153\" srcset=\"https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/Queensgatestage704x540.jpg 704w, https:\/\/www.prior.com\/wp-content\/uploads\/2026\/09\/Queensgatestage704x540-300x230.jpg 300w\" sizes=\"(max-width: 704px) 100vw, 704px\" \/><\/figure>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u539f\u5b50\u529b\u663e\u5fae\u955c\u7684\u5feb\u901f\u626b\u63cf\uff1a\u5b9e\u73b0\u95ed\u73af\u901f\u5ea6\u63a7\u5236\u7684\u589e\u76ca 07.04.21 \u6587\u7ae0\u6700\u521d\u4e8e2021\u5e744\u67087\u65e5\u53d1\u8868\u5728&nbsp;physicsworld.com&nbsp;\u7f51\u7ad9\u3002 \u7eb3\u7c73\u5b9a\u4f4d\u4e13\u5bb6Queensgate \u6b63\u4e3a\u9ad8\u901f\u3001\u9ad8\u7cbe\u5ea6\u539f\u5b50\u529b\u663e\u5fae\u955c (AFM) \u7cfb\u7edf\u7684\u5e94\u7528\u505a\u6280\u672f\u652f\u6301\u7684\u51c6\u5907\u3002 \u82f1\u56fd\u9ad8\u7cbe\u5ea6\u7eb3\u7c73\u5b9a\u4f4d\u4ea7\u54c1\u5236\u9020\u5546Queensgate&nbsp;\u4e0e\u82f1\u56fd\u56fd\u5bb6\u8ba1\u91cf\u7814\u7a76\u6240\u56fd\u5bb6\u7269\u7406\u5b9e\u9a8c\u5ba4 (NPL) \u7684\u79d1\u7814\u56e2\u961f\u5408\u4f5c\u7814\u53d1\u6240\u53d6\u5f97\u7684\u5b9e\u9a8c\u6210\u679c\uff0c\u6709\u671b\u83b7\u5f97\u4e0b\u4e00\u4ee3\u539f\u5b50\u529b\u663e\u5fae\u955c (AFM) \u548c\u5176\u4ed6\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c (SPM) \u7cfb\u7edf\u5236\u9020\u5546\u7684\u5173\u6ce8\u3002 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Heaps\uff0c\u4ee3\u8868Queensgate\u8fdb\u884c\u5b9e\u9a8c\u5de5\u4f5c\uff0c\u4ed6\u89e3\u91ca\u9053\uff0c&ldquo;\u6700\u7ec8\uff0cM4R\u7684\u76ee\u7684\u662f\u5e2e\u52a9\u82f1\u56fd\u63d0\u9ad8\u75ab\u60c5\u540e\u5de5\u4e1a\u7684\u751f\u4ea7\u529b\u548c\u7ade\u4e89\u529b\u3002&rdquo; \u5411\u4f20\u7edf\u8bf4&ldquo;NO&rdquo; \u4e3a\u4e86\u5c06NPL\u7814\u7a76\u7f6e\u4e8e\u4e0a\u4e0b\u6587\u4e2d\uff0c\u9996\u5148\u6709\u5fc5\u8981\u56de\u987e\u4e00\u4e0bAFM\u7684\u57fa\u672c\u539f\u7406\u3002SPM\u6a21\u5f0f\u4f7f\u7528\u9644\u7740\u5728\u60ac\u81c2\u4e0a\u7684\u8d85\u7ec6\u5fae\u63a2\u9488\uff08\u901a\u5e38\u662fSi\u6216Si3N4\uff09\u4ee5\u975e\u5e38\u9ad8\u7684\u5206\u8fa8\u7387\uff081-20 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