ProScan H112/2ST Large Format Motorized XY Stage
Heavy Load 12-inch Travel Range For Upright Industrial Microscopes (302 mm x 302 mm travel)
The ProScan H112/2ST motorized XY stage is compatible with Nikon and Evident/Olympus upright industrial microscopes, Prior’s OpenStand-L platform, and is easily integrated into custom microscopes.
Designed for scanning large, heavy samples such as 12-inch semiconductor wafers, flat panel displays, and printed circuit boards, it offers the longest travel range of any of Prior’s XY stages.
The H112/2ST features a 2 mm ballscrew for for a balance of speed and resolution.The HE12/2ST encoded version also has linear encoders for exceptional long-range repeatability.
The stage features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity, is compatible with transmitted light applications and provides easy access for loading samples.
This stage is compatible with Nikon NIS Elements, Olympus Stream Motion and Evident PRECiV software (appropriate package required).
- Directly compatible with Nikon and Evident/Olympus industrial microscopes and software
- Lightweight and slim design facilitates integration
- 12-inch travel range for semiconductor applications
- Intelligent Scanning Technology™ (US Patent 7,330,307)
- Shielded linear encoders for enhanced long range repeatability (HE12/2ST only)
| Specification | H112/2ST | HE12/2ST |
|---|---|---|
| Travel range | 302 mm x 302 mm | 302 mm x 302 mm |
| Uni-directional repeatability | < 1.4 µm | < 0.9 µm |
| Bidirectional repeatability | < 4.1 µm | < 1.8 µm |
| Metric accuracy | 0.20 µm/mm | 0.15 µm/mm |
| Full travel metric accuracy | < 60.0 µm | < 45.0 µm |
| Resolution | 0.04 µm | 0.1 µm |
| Squareness | < 55 arcsec | < 40 arcsec |
| Maximum velocity | 60 mm/s | 60 mm/s |
| Maximum load | 25 kg | 25 kg |
| Encoders | No | 0.1 µm linear encoders |
| Motor type | 200 step | 200 step |
| Screw pitch | 2 mm | 2 mm |
| Weight | 13 kg | 13 kg |
- H221 Glass plate (not suitable for transmitted light microscopy).
- H233 Aluminum plate (H112)
- H233B Aluminum plate (H112) with M4 and M6 tapped holes.
- HWC30S Wafer chuck, rotatable with steps for 200 mm & 300 mm wafers.
- HWC30V Wafer chuck, rotatable with steps for 300 mm wafers.
H112_2ST_H112_STAGE-IGES.zip
H112_2ST_H112_STAGE-PART-NONAMES.zip
H112-Large-Format-Stage-Datasheet.pdf
Nikon-EN-US-Sales-Guide.pdf
Evident-Olympus-EN-US-Sales-Guide.pdf
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| H112/2ST | Evident/Olympus | MX61L, MX63L | |
| H112/2ST | Nikon | L300N, L300ND | Requires travel range reduction. Please contact Prior Scientific. |
| H112/2ST | Prior | OpenStand-L | |
| HE12/2ST | Evident/Olympus | MX61L, MX63L | |
| HE12/2ST | Nikon | L300N, L300ND | Requires travel range reduction. Please contact Prior Scientific. |
| HE12/2ST | Prior | OpenStand-L |
