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H138XTH ProScan™ X-Theta Motorized Stage

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Key features:
•9" inch travel

The H138XTH ProScan™ X-Theta Stage enables your microscope to function as a stand-alone inspection station, with a keypad providing all the necessary tools to program 50 rotation and/or index patterns. The H138XTH offers 9 inch X travel and is available with chucks for 65 and 95 millimeter disks and offers precise, repeatable results. A standard communication port allows the system to be controlled from a PC for expanded measurement and data collection techniques.

Specifications:

Travel range: 9 inches (230 mm) in X, 360° in Theta
Minimum step size: To .02 µm in X, 0.01° in Theta
Max load: 0.5 kg (1.1 lbs)
Drive mechanism: Zero backlash, recirculating ball screws, 2mm pitch in X. Precision timing belt in Theta.
 
microscope range

ProScan™ Motorized Stages
H101A | H105 | H107 | H112 | H116 | H117 | H138A | HT1010 | HT1111 | HT5050 | H101XTH | H138XTH | Wafer Shuttle Stage |
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