Download Datasheet >> Key features: • Suitable for most major brand microscopes. • 2um or better repeatability • Quiet and reliable • Wide range of wafer holders. • 254mm x 215 mm (10"x8.5") travel

The H116 stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.

Specifications:

Travel range:	254 mm x 215 mm
Minimum step size:	0.1um
Max load:	25 kg
Max speed:	60mm/s

Options:

The H116 stages come with a range of ball screw pitch options, choose a 2mm pitch balls screw for accuracy and smoothness under high magnification and a 5mm pitch ball screw for faster speeds. Linear or rotary encoders can be fitted to all H116 stages.

Ball screws		2mm*	5mm
Motors		200 step
Linear encoders	0.5um	0.1um*
Rotary encoders are available - please contact Prior Scientific for details. * Standard option.

Click here to see the extensive range of sample holders available for the H116 stage.