Download Datasheet >> Key features: • Suitable for most major brand microscopes. • 2um or better repeatability • Optional 100nm linear scales provide the highest resolution available. • Wide range of wafer holders • 300 mm x 300 mm (12"x12") travel

The H112 stage is ideal for scanning a wide range of semiconductor wafers, photo masks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12 inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with
250 mm x 250 mm transmitted light area.

Specifications:

Travel range:	300 mm x 300 mm
Minimum step size:	0.04um
Max load:	25kg
Max Speed:	60mm/s

Options:

The H112 stages come with a range of ball screw pitch options, choose a 2mm pitch balls screw for accuracy and smoothness under high magnification and a 5mm pitch ball screw for faster speeds. Linear or rotary encoders can be fitted to all H112 stages.

Ball screws		2mm*	5mm
Motors		200 step
Linear Encoders	0.5um	0.1um*
Rotary encoders are available - please contact Prior Scientific for details. * Standard option.

Click here to see the extensive range of sample holders available for the H112 stage.