Download Datasheet >> Key features: • Suitable for most major brand microscopes. • 1.5um or better repeatability • Quiet and reliable • Wide range of sample holders • Optional 100nm linear scales provide the highest precision available

The H105 is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 can easily accommodate 6" wafers.

Click here to see the variety of sample holders that are available and stage inserts can be customized for any application.

Specifications:

Travel range:	154 mm x 154 mm
Minimum step size:	0.04um
Max load:	20kg
Max speed:	60mm/s

Options:

The H105 stages come with a range of ball screw pitch options, choose a 2mm pitch balls screw for accuracy and smoothness under high magnification and a 5mm pitch ball screw for faster speeds. Linear or rotary encoders can be fitted to all H105 stages.

Ball screws		2mm*	5mm
Motors		200 step
Rotary encoders	2000* Counts per revolution		4000 Counts per revolution
Linear encoders	0.5um	0.1um*
Rotary encoders are available - please contact Prior Scientific for details. * Standard option.

Click here to see the extensive range of sample holders available for the H105 stage.