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prior scientific
H101XTH ProScan™ X-Theta Motorized Stage

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Key features:
•4.25" inch travel

The H101XTH ProScan™ X-Theta Stage has a 4.25" inch travel and is available with chucks for 65 and 95 millimeter disks and offers precise, repeatable results. A standard communication port allows the system to be controlled from a PC for expanded measurement and data collection techniques.

Specifications:

Travel range: 4.25 inches (108 mm) in X, 360° in Theta
Minimum step size: 0.04 µm in X; better than ± 0.20° in Theta
Max load: 0.5 kg (1.1 lbs)
Drive mechanism: Zero backlash, recirculating ball screws, 2mm pitch in X. Precision timing belt in Theta.
 
microscope range

ProScan™ Motorized Stages
H101A | H105 | H107 | H112 | H116 | H117 | H138A | HT1010 | HT1111 | HT5050 | H101XTH |
Wafer Shuttle Stage |
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